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Year of Publication 09.06.2021
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Year of Publication 25.06.2020
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Year of Publication 18.02.2021
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Year of Publication 18.02.2021
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SEMICONDUCTOR PROCESSING TOOL
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Year of Publication 24.01.2019
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Year of Publication 24.01.2019
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MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS
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Year of Publication 04.04.2017
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Year of Publication 04.04.2017
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TEMPERATURE CONTROL SYSTEMS AND METHODS FOR SMALL BATCH SUBSTRATE HANDLING SYSTEMS
DANIEL JR. MALCOLM N, BLAHNIK JEFFREY C, YUDOVSKY JOSEPH, WEAVER WILLIAM T, VOPAT ROBERT B, SCHALLER JASON M
Year of Publication 25.11.2015
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Year of Publication 25.11.2015
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SEMICONDUCTOR PROCESSING TOOL
ALEXANDER KRUPYSHEV, MARTIN R ELLIOT, JOSEPH HALLISEY, CHRISTOPHER HOFMEISTER, CRAIG J CARBONE, BLAHNIK JEFFREY C, JOSEPH A KRAUS, WILLIAM FOSNIGHT, FONG HI YIN OWEN
Year of Publication 01.09.2016
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Year of Publication 01.09.2016
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SUBSTRATE PROCESSING TOOL
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Year of Publication 24.12.2015
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Year of Publication 24.12.2015
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Year of Publication 28.12.2023
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Year of Publication 28.12.2023
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Processing chamber with annealing mini-environment
Vopat, Robert Brent, Carlson, Charles, Honan, Michael, Blahnik, David, Blahnik, Jeffrey
Year of Publication 17.10.2023
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Year of Publication 17.10.2023
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Reticle processing system
Vopat, Robert Brent, Strassner, James, Carlson, Charles, Blahnik, Jeffrey
Year of Publication 10.11.2020
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Year of Publication 10.11.2020
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