A Physics-based Model for Negative Tone Development Materials
Fang, Chao, Smith, Mark D., Robertson, Stewart, Biafore, John J., Pret, Alessandro Vaglio
Published in Journal of Photopolymer Science and Technology (01.01.2014)
Published in Journal of Photopolymer Science and Technology (01.01.2014)
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Journal Article
Pursuit of Lower Critical Dimensional Uniformity in EUV Resists
Thackeray, James, Cameron, James, Jain, Vipul, LaBeaume, Paul, Coley, Suzanne, Ongayi, Owendi, Wagner, Mike, Rachford, Aaron, Biafore, John
Published in Journal of Photopolymer Science and Technology (01.01.2013)
Published in Journal of Photopolymer Science and Technology (01.01.2013)
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Progress Towards Production Worthy EUV Photoresists: Balancing Litho, Outgassing and OOB Performance
Cameron, James, Thackeray, James, Jain, Vipul, LaBeaume, Paul, Coley, Suzanne, Ongayi, Owendi, Wagner, Mike, Biafore, John
Published in Journal of Photopolymer Science and Technology (01.01.2014)
Published in Journal of Photopolymer Science and Technology (01.01.2014)
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Mask Effects on Resist Variability in Extreme Ultraviolet Lithography
Pret, Alessandro Vaglio, Gronheid, Roel, Engelen, Jan, Yan, Pei-Yang, Leeson, Michael J, Younkin, Todd R, Garidis, Konstantinos, Biafore, John
Published in Japanese Journal of Applied Physics (01.06.2013)
Published in Japanese Journal of Applied Physics (01.06.2013)
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Understanding the Role of Acid vs. Electron Blur in EUV Resist Materials
Thackeray, James W., Wagner, Mike, Kang, Su Jun, Biafore, John
Published in Journal of Photopolymer Science and Technology (01.01.2010)
Published in Journal of Photopolymer Science and Technology (01.01.2010)
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Advances in Low Diffusion EUV Resists
Thackeray, James W., Cameron, James F., Wagner, Michael, Coley, Suzanne, Labeaume, Vipu Paul, Ongayi, Owndi, Montgomery, Warren, Lovell, Dave, Biafore, John, Chakrapane, Vidhya, Ko, Akiteru
Published in Journal of Photopolymer Science and Technology (01.01.2012)
Published in Journal of Photopolymer Science and Technology (01.01.2012)
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Design Considerations for Anti-reflection Layer in Thin Imaging System
Malik, Sanjay, De, Binod, Biafore, John, Spaziano, Greg, Sarubbi, Tom, Dilocker, Stephanie, Bowden, Murrae, Reybrouc, Mario, Grozev, Grozdan, Driessche, Veerle van, Tzviatkov, Plamen
Published in Journal of Photopolymer Science and Technology (2001)
Published in Journal of Photopolymer Science and Technology (2001)
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네거티브 톤 현상 가능한 포토 레지스트의 컴퓨터 모델링 및 시뮬레이션을 위한 개선된 방법
BLANKENSHIP DAVID A, SMITH MARK D, BIAFORE JOHN J, GRAVES TREY (JOHN) S, VAGLIO PRET ALESSANDRO
Year of Publication 26.02.2019
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Year of Publication 26.02.2019
Patent
Progress Towards Production Worthy EUV Photoresists
Cameron, James, Thackeray, James, Jain, Vipul, LaBeaume, Paul, Coley, Suzanne, Ongayi, Owendi, Wagner, Mike, Biafore, John
Published in Journal of photopolymer science and technology (01.09.2014)
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Published in Journal of photopolymer science and technology (01.09.2014)
Journal Article
Advances in Resist Materials for 193nm Lithography
Bowden, Murrae J., Gabor, Allen H., Dimov, Ognian, Medina, Arturo N., Foster, Patrick, Steinhäusler, Thomas, Biafore, John J., Spaziano, Gregory, Slater, Sydney G., Blakeney, Andrew J., Neisser, Mark O., Houlihan, Frank M., Cirelli, Ray A., Dabbagh, Gary, Hutton, Richard S., Rushkin, Ilya L., Sweeney, James R., Timko, Allen G., Nalamasu, Om, Reichmanis, Elsa
Published in Journal of Photopolymer Science and Technology (30.05.1999)
Published in Journal of Photopolymer Science and Technology (30.05.1999)
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Journal Article
Advances in Resist Materials for 193 nm Lithography
Bowden, Murrae J., Gabor, Allen H., Dimov, Ognian, Medina, Arturo N., Foster, Patrick, Steinhäusler, Thomas, Biafore, John J., Spaziano, Gregory, Slater, Sydney G., Blakeney, Andrew J., Neisser, Mark O., Houlihan, Frank M., Cirelli, Ray A., Dabbagh, Gary, Hutton, Richard S., Rushkin, Ilya L., Sweeney, James R., Timko, Allen G., Nalamasu, Om, Reichmanis, Elsa
Published in Journal of photopolymer science and technology (1999)
Published in Journal of photopolymer science and technology (1999)
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Journal Article