작업물의 일 부분을 패시베이팅하는 방법
BHOSLE VIKRAM M, BATEMAN NICHOLAS P.T, MITTAL DEVEN RAJ, LEE JUN SEOK, MILLER TIMOTHY J
Year of Publication 23.03.2023
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Year of Publication 23.03.2023
Patent
Thermal stability, mechanical and electrical properties of nanocrystalline Cu3Ge
Darling, Kris A., Guduru, R.K., Reynolds, C. Lewis, Bhosle, Vikram M., Chan, Ryan N., Scattergood, Ronald O., Koch, Carl C., Narayan, J., Aboelfotoh, M.O.
Published in Intermetallics (01.03.2008)
Published in Intermetallics (01.03.2008)
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Journal Article
METHOD OF IMPROVING ION BEAM QUALITY IN AN IMPLANT SYSTEM
KOO BON WOONG, BATEMAN NICHOLAS PT, BHOSLE VIKRAM M, FRONTIERO JOHN A, MILLER TIMOTHY J, GRAFF JOHN W
Year of Publication 25.03.2016
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Year of Publication 25.03.2016
Patent
METHOD FOR IMPLANT PRODUCTIVITY ENHANCEMENT
KOO BON WOONG, BHOSLE VIKRAM M, LEAVITT CHRISTOPHER J, JOHN W. GRAFF, KURUNCZI PETER F, FRONTIERO JOHN A, LEVAY WILLIAM T, BATEMAN NICHOLAS P. T, MILLER TIMOTHY J
Year of Publication 27.07.2016
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Year of Publication 27.07.2016
Patent
Thermal stability, mechanical and electrical properties of nanocrystalline Cu 3Ge
Darling, Kris A., Guduru, R.K., Reynolds, C. Lewis, Bhosle, Vikram M., Chan, Ryan N., Scattergood, Ronald O., Koch, Carl C., Narayan, J., Aboelfotoh, M.O.
Published in Intermetallics (2008)
Published in Intermetallics (2008)
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Journal Article
SYSTEM AND METHOD FOR REDUCING PARTICLE FORMATION IN A PROCESS CHAMBER OF AN ION IMPLANTER
BHOSLE, Vikram M, STRATOTI, Gregory Edward, KOO, Bon-Woong, SINCLAIR, Frank, HSIEH, Tseh-Jen
Year of Publication 15.08.2024
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Year of Publication 15.08.2024
Patent
System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter
Sinclair, Frank, Bhosle, Vikram M, Koo, Bon-Woong, Stratoti, Gregory Edward, Hsieh, Tseh-Jen
Year of Publication 15.08.2024
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Year of Publication 15.08.2024
Patent
FLUORINE BASED CLEANING FOR PLASMA DOPING APPLICATIONS
CAI, Meng, BHOSLE, Vikram M, DENO, Vincent, MITTAL, Deven Matthew Raj
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
FLUORINE BASED CLEANING FOR PLASMA DOPING APPLICATIONS
Deno, Vincent, Mittal, Deven Matthew Raj, Cai, Meng, Bhosle, Vikram M
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS
BHOSLE, Vikram M, LEE, Jun Seok, MILLER, Timothy J, MITTAL, Deven Raj
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
Patent
CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS
Lee, Jun Seok, Mittal, Deven Raj, Bhosle, Vikram M, Miller, Timothy J
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
Patent
COVER RING TO MITIGATE CARBON CONTAMINATION IN PLASMA DOPING CHAMBER
BHOSLE, Vikram M, TYE, Jordan B, LEAVITT, Christopher J, MILLER, Timothy J, HERMANSON, Eric D
Year of Publication 14.09.2023
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Year of Publication 14.09.2023
Patent
COVER RING TO MITIGATE CARBON CONTAMINATION IN PLASMA DOPING CHAMBER
Leavitt, Christopher J, Bhosle, Vikram M, Miller, Timothy J, Hermanson, Eric D, Tye, Jordan B
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
Patent
Plasma processing apparatus and techniques
Leavitt, Christopher J, Colom, Guillermo, Bhosle, Vikram M, Miller, Timothy J
Year of Publication 28.03.2023
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Year of Publication 28.03.2023
Patent
Sacrificial capping layer for passivation using plasma-based implant process
Bateman, Nicholas P. T, Lee, Jun Seok, Mittal, Deven Raj, Bhosle, Vikram M, Miller, Timothy J
Year of Publication 15.11.2022
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Year of Publication 15.11.2022
Patent
SACRIFICIAL CAPPING LAYER FOR PASSIVATION USING PLASMA-BASED IMPLANT PROCESS
BHOSLE, Vikram M, BATEMAN, Nicholas P.T, LEE, Jun Seok, MILLER, Timothy J, MITTAL, Deven Raj
Year of Publication 27.01.2022
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Year of Publication 27.01.2022
Patent