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Year of Publication 23.08.2023
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에지 클램핑을 통한 얇은 기판 처리를 위한 증착 링
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Year of Publication 22.08.2023
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Year of Publication 22.08.2023
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Common substrate and shadow ring lift apparatus
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Year of Publication 23.01.2024
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Deposition ring for thin substrate handling via edge clamping
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Year of Publication 24.09.2024
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Cover ring for use in semiconductor processing chamber
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Year of Publication 06.08.2024
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Year of Publication 06.08.2024
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Thin substrate handling via edge clamping
Lu, Siqing, Suarez, Edwin C, Sathyanarayana, Harisha, Chowdhury, Abhishek, Bhaskar Rao, Nataraj
Year of Publication 28.05.2024
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Year of Publication 28.05.2024
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COMMON SUBSTRATE AND SHADOW RING LIFT APPARATUS
PATIL, Ravikumar, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
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COMMON SUBSTRATE AND SHADOW RING LIFT APPARATUS
PATIL, Ravikumar, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
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DEPOSITION RING FOR THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
SATHYANARAYANA, Harisha, SUAREZ, Edwin, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 27.05.2022
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Year of Publication 27.05.2022
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THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
SATHYANARAYANA, Harisha, SUAREZ, Edwin, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 27.05.2022
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Year of Publication 27.05.2022
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DEPOSITION RING FOR THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
SATHYANARAYANA, Harisha, SUAREZ, Edwin C, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
SATHYANARAYANA, Harisha, SUAREZ, Edwin C, LU, Siqing, CHOWDHURY, Abhishek, BHASKAR RAO, Nataraj
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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Thin substrate manipulation via edge gripping
SUAREZ EDWIN C, CHOUDHURY, ABHISHEK, LU SIQING, RAO NATARAJ BHASKAR, SATYANARAYANA, HARISHA
Year of Publication 05.09.2023
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Year of Publication 05.09.2023
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Deposition ring for thin substrate manipulation via edge gripping
SUAREZ EDWIN C, CHOUDHURY, ABHISHEK, RAO NATARAJ BHASKAR, LU SIQING, SATYANARAYANA, HARISHA
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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