투영 노광 장치의 반사 광학 요소를 제조하기 위한 방법 및 투영 노광 장치용 반사 광학 요소, 투영 렌즈 및 투영 노광 장치
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Year of Publication 17.03.2021
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Year of Publication 17.03.2021
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Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
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Year of Publication 16.08.2022
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Year of Publication 16.08.2022
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
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Year of Publication 27.05.2021
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Year of Publication 27.05.2021
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
MANGER, Matthias, KÄS, Matthias, PAULS, Walter, ALEXEEV, Pavel, BEZOLD, Steffen, PETRI, Christoph
Year of Publication 16.01.2020
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Year of Publication 16.01.2020
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
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Year of Publication 30.03.2021
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Year of Publication 30.03.2021
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
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Year of Publication 21.11.2020
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Year of Publication 21.11.2020
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Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
PETRI, CHRISTOPH, PAULS, WALTER, BEZOLD, STEFFEN, ALEXEEV, PAVEL, KAES, MATTHIAS, MANGER, MATTHIAS
Year of Publication 01.04.2020
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Year of Publication 01.04.2020
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Verfahren zur Herstellung eines reflektierenden optischen Elementes einer Projektionsbelichtungsanlage und reflektierendes optisches Element für eine Projektionsbelichtungsanlage, Projektionsobjektiv und Projektionsbelichtungsanlage
Pauls, Walter, Alexeev, Pavel, Bezold, Steffen, Manger, Matthias, Käs, Matthias, Petri, Christoph
Year of Publication 16.01.2020
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Year of Publication 16.01.2020
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