Ion beam sputter etching of galliumnitride grown by chloride transport LP–CVD
Topf, Michael, Cavas, Fehmi, Meyer, Bruno K, Kempf, Bertilo, Betz, Walter, Veit, Peter
Published in Materials science & engineering. B, Solid-state materials for advanced technology (06.05.1999)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (06.05.1999)
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