Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates
ELERS, K.-E, SAANILA, V, LI, W.-M, SOININEN, P. J, KOSTAMO, J. T, HAUKKA, S, JUHANOJA, J, BESTING, W. F. A
Published in Thin solid films (23.06.2003)
Published in Thin solid films (23.06.2003)
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