X-ray investigation of annealed CeO2 films prepared by sputtering on Si substrates
IORDANOVA, I, POPOVA, L, ALEKSANDROVA, P, BESHKOV, G, VLAHKOV, E, MIRCHEV, R, BLAGOEV, B
Published in Thin solid films (31.07.2007)
Published in Thin solid films (31.07.2007)
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Journal Article
Stress in boron nitride nanofilms prepared by rapid thermal annealing
Christova, K, Boradjiev, I, Spassov, D, Beshkov, G
Published in Journal of Optoelectronics and Advanced Materials (01.10.2009)
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Published in Journal of Optoelectronics and Advanced Materials (01.10.2009)
Journal Article
Plasma nitridation of silicon by N2 and NH3 in PECVD reactor
Bakardjieva, V S, Alexieva, Z I, Beshkov, G D, Mateev, E S
Published in Journal of physics. Conference series (01.04.2010)
Published in Journal of physics. Conference series (01.04.2010)
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Journal Article
Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique
Djulgerova, R, Popova, L, Beshkov, G, Petrovic, Z Lju, Rakocevic, Z, Mihailov, V, Gencheva, V, Dohnalik, T
Published in Journal of physics. D, Applied physics (07.08.2006)
Published in Journal of physics. D, Applied physics (07.08.2006)
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Journal Article
IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films
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Journal Article
Conference Proceeding
XPS study of BNx nanolayers prepared by low pressure rapid thermal annealing in ammonia
Beshkov, G, Spassov, D, Krastev, V, Stefanov, P, Georgiev, S, Nemska, S
Published in Journal of physics. Conference series (01.05.2008)
Published in Journal of physics. Conference series (01.05.2008)
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Journal Article
Nanocluster evolution in Ge+ ion implanted Ta2O5 layers
Peeva, A, Kalitzova, M, Beshkov, G, Zollo, G, Vitali, G, Skorupa, W
Published in Materials letters (01.07.2007)
Published in Materials letters (01.07.2007)
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Journal Article
Investigation of the growth mechanism and structure of nanocrystalline diamond films by rapid thermal annealing
Kulisch, W., Popov, C., Boycheva, S., Beshkov, G., Vorlicek, V., Gibson, P.N., Georgiev, G.
Published in Thin solid films (22.12.2004)
Published in Thin solid films (22.12.2004)
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Journal Article
Optical properties of PECVD carbon films on silicon subjected to rapid thermal annealing
Vlaikova, E, Szekeres, A, Georgiev, S, Beshkov, G
Published in Journal of Optoelectronics and Advanced Materials (01.02.2007)
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Published in Journal of Optoelectronics and Advanced Materials (01.02.2007)
Journal Article
Influence of the rapid thermal annealing on the properties of a-C:H/c-Si structures
Georgiev, S, Szekeres, A, Vlaikova, E, Beshkov, G, Sueva, D, Manolov, E
Published in Journal of physics. Conference series (01.05.2008)
Published in Journal of physics. Conference series (01.05.2008)
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Journal Article
Raman and X-ray photoelectron spectroscopy study of carbon nitride thin films
Petrov, P, Dimitrov, D.B, Papadimitriou, D, Beshkov, G, Krastev, V, Georgiev, Ch
Published in Applied surface science (01.10.1999)
Published in Applied surface science (01.10.1999)
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Journal Article
Structural investigations of RTA boron-doped thin a-Si layers
Popova, L, Peneva, St, Aleksandrova, P, Beshkov, G
Published in Journal of materials science. Materials in electronics (01.08.2005)
Published in Journal of materials science. Materials in electronics (01.08.2005)
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Journal Article
SnO2 thin films for gas sensors modified by hexamethyldisilazane after rapid thermal annealing
Popova, L., Djulgerova, R., Beshkov, G., Mihailov, V., Szytula, A., Gondek, L., Petrovic, Z.j.
Published in Sensors and actuators. B, Chemical (15.05.2004)
Published in Sensors and actuators. B, Chemical (15.05.2004)
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Journal Article
Iron silicide formed in a-Si:Fe thin films by magnetron co-sputtering and ion implantation
Nikolaeva, M, Sendova-Vassileva, M, Dimova-Malinovska, D, Karpuzov, D, Pivin, J.C, Beshkov, G
Published in Vacuum (24.12.2002)
Published in Vacuum (24.12.2002)
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Conference Proceeding
On the refractive index dispersions of ion-beam-synthesized β-FeSi2 layers
BALEVA, M, GORANOVA, E, ANGELOV, Ch, BESHKOV, G
Published in Journal of materials science. Materials in electronics (01.10.2003)
Published in Journal of materials science. Materials in electronics (01.10.2003)
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Conference Proceeding
Hardness of C, CNx and AlN thin films after rapid thermal annealing
BESHKOV, G, VASSILEV, G. P, ELIZALDE, M. R, GOMEZ-ACEBO, T
Published in Materials chemistry and physics (15.11.2003)
Published in Materials chemistry and physics (15.11.2003)
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Journal Article
XPS spectra of thin CNx films prepared by chemical vapor deposition
Beshkov, G, Dimitrov, D.B, Georgiev, St, Juan-Cheng, D, Petrov, P, Velchev, N, Krastev, V
Published in Diamond and related materials (01.03.1999)
Published in Diamond and related materials (01.03.1999)
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Journal Article
PROPERTIES OF Cr AND Mo THIN FILMS DEPOSITED BY RF SPUTTERING
Dicov, Ch, Marinov, M, Maciel, H, Grigorov, K, Nedkov, I, Beshkov, G
Published in Journal of Optoelectronics and Advanced Materials (01.02.2005)
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Published in Journal of Optoelectronics and Advanced Materials (01.02.2005)
Journal Article
X-ray photoelectron spectroscopy study of carbon nitride films
Krastev, V., Petrov, P., Dimitrov, D., Beshkov, G., Georgiev, Ch, Nedkov, I.
Published in Surface & coatings technology (01.03.2000)
Published in Surface & coatings technology (01.03.2000)
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Journal Article
Conference Proceeding
X-Ray photoelectron spectroscopy study of phosphorus silicate glasses
Beshkov, G., Krastev, V., Grigorov, K., Maciel, H., Tang, Ting-Ao, Huang, Veining
Published in Surface & coatings technology (01.11.2002)
Published in Surface & coatings technology (01.11.2002)
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