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Year of Publication 20.07.2023
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TAMPING SIMULATOR AND ASSOCIATED METHOD
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Year of Publication 15.06.2023
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Year of Publication 15.06.2023
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TAMPING SIMULATOR AND ASSOCIATED METHOD
BERTELE, Andreas J, JEPPERSON, Delbert, JEPPERSON, Jason, QUIST, Joseph, LEE, Stephen
Year of Publication 15.06.2023
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Year of Publication 15.06.2023
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Year of Publication 25.04.2019
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Year of Publication 25.04.2019
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PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
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Year of Publication 05.11.2015
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Projection exposure apparatus for semiconductor lithography including an actuator system
KLOESCH PETER, SIGEL BENJAMIN, MAHLMANN MARTIN, BERTELE ANDREAS, WEBER JOCHEN
Year of Publication 12.05.2015
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Year of Publication 12.05.2015
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MARTIN MAHLMANN, SIGEL BENJAMIN, ANDREAS BERTELE, PETER KLOESCH, WEBER JOCHEN
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Year of Publication 26.06.2014
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PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM
KLOESCH PETER, SIGEL BENJAMIN, MAHLMANN MARTIN, BERTELE ANDREAS, WEBER JOCHEN
Year of Publication 29.12.2011
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Year of Publication 29.12.2011
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PROJECTION EXPOSURE APPARATUS COMPRISING AN ACTUATOR SYSTEM
BERTELE, ANDREAS, KLOESCH, PETER, MAHLMANN, MARTIN, SIGEL, BENJAMIN, WEBER, JOCHEN
Year of Publication 26.08.2010
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Year of Publication 26.08.2010
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PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
SCHWAER JOCHEN, SCHOEPPACH ARMIN, SCHLETTERER THOMAS, RIEF KLAUS, BLEIDISTEL SASCHA, SCHWAER BAERBEL, BECKENBACH MARIELLA, HOEGELE ARTUR, BERTELE ANDREAS, HUMMEL WOLFGANG, GRUNER TORALF, SIGEL BENJAMIN, FROMMEYER ANDREAS
Year of Publication 27.05.2010
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Year of Publication 27.05.2010
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PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE
SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
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Year of Publication 10.06.2009
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Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem Aktuatorsystem
BERTELE, ANDREAS, KLOESCH, PETER, MAHLMANN, MARTIN, SIGEL, BENJAMIN, WEBER, JOCHEN
Year of Publication 26.08.2010
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Year of Publication 26.08.2010
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PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE
SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Year of Publication 19.06.2008
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Year of Publication 19.06.2008
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PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE
SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Year of Publication 03.04.2008
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Year of Publication 03.04.2008
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