Search Results - "BERTELE, ANDREAS" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

TAMPING SIMULATOR AND ASSOCIATED METHOD

TAMPING SIMULATOR AND ASSOCIATED METHOD

by BERTELE, Andreas J, JEPPERSON, Delbert, JEPPERSON, Jason, QUIST, Joseph, LEE, Stephen
Year of Publication 20.07.2023

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Patent

TAMPING SIMULATOR AND ASSOCIATED METHOD

TAMPING SIMULATOR AND ASSOCIATED METHOD

by BERTELE, Andreas J, JEPPERSON, Delbert, JEPPERSON, Jason, QUIST, Joseph, LEE, Stephen
Year of Publication 15.06.2023

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Patent

TAMPING SIMULATOR AND ASSOCIATED METHOD

TAMPING SIMULATOR AND ASSOCIATED METHOD

by BERTELE, Andreas J, JEPPERSON, Delbert, JEPPERSON, Jason, QUIST, Joseph, LEE, Stephen
Year of Publication 15.06.2023

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Patent

Force actuator

Force actuator

by VOGT PETER, BERTELE ANDREAS
Year of Publication 10.09.2013

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Patent

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

by Weber, Jochen, Sigel, Benjamin, Bertele, Andreas, Kloesch, Peter, Mahlmann, Martin
Year of Publication 25.04.2019

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Patent

Force Actuator

Force Actuator

by VOGT PETER, BERTELE ANDREAS
Year of Publication 09.04.2009

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Patent

Actuator arrangement for deforming e.g. lens, of optical arrangement of microlithography device, has actuator devices exerting actuator forces on body until reaching maximum force values, where one value is smaller than other value

Actuator arrangement for deforming e.g. lens, of optical arrangement of microlithography device, has actuator devices exerting actuator forces on body until reaching maximum force values, where one value is smaller than other value

by BERTELE, ANDREAS, VOGT, PETER
Year of Publication 26.02.2009

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Patent

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

by KLOESCH PETER, SIGEL BENJAMIN, MAHLMANN MARTIN, BERTELE ANDREAS, WEBER JOCHEN
Year of Publication 05.11.2015

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Patent

Projection exposure apparatus for semiconductor lithography including an actuator system

Projection exposure apparatus for semiconductor lithography including an actuator system

by KLOESCH PETER, SIGEL BENJAMIN, MAHLMANN MARTIN, BERTELE ANDREAS, WEBER JOCHEN
Year of Publication 12.05.2015

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Patent

Mirror assembly for projection exposure system, for microlithography, has body magnets and counter magnets that are attached with poles such that part of magnets is aligned opposite to alignment of another part of magnets

Mirror assembly for projection exposure system, for microlithography, has body magnets and counter magnets that are attached with poles such that part of magnets is aligned opposite to alignment of another part of magnets

by BERTELE, ANDREAS, KLÖSCH, PETER
Year of Publication 14.08.2014

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Patent

PROJECTION EXPOSURE APPARATUS COMPRISING ACTUATOR SYSTEM

PROJECTION EXPOSURE APPARATUS COMPRISING ACTUATOR SYSTEM

by MARTIN MAHLMANN, SIGEL BENJAMIN, ANDREAS BERTELE, PETER KLOESCH, WEBER JOCHEN
Year of Publication 26.06.2014

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Patent

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

by KLOESCH PETER, SIGEL BENJAMIN, MAHLMANN MARTIN, BERTELE ANDREAS, WEBER JOCHEN
Year of Publication 29.12.2011

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Patent

PROJECTION EXPOSURE APPARATUS COMPRISING AN ACTUATOR SYSTEM

PROJECTION EXPOSURE APPARATUS COMPRISING AN ACTUATOR SYSTEM

by BERTELE, ANDREAS, KLOESCH, PETER, MAHLMANN, MARTIN, SIGEL, BENJAMIN, WEBER, JOCHEN
Year of Publication 26.08.2010

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Patent

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

by SCHWAER JOCHEN, SCHOEPPACH ARMIN, SCHLETTERER THOMAS, RIEF KLAUS, BLEIDISTEL SASCHA, SCHWAER BAERBEL, BECKENBACH MARIELLA, HOEGELE ARTUR, BERTELE ANDREAS, HUMMEL WOLFGANG, GRUNER TORALF, SIGEL BENJAMIN, FROMMEYER ANDREAS
Year of Publication 27.05.2010

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Patent

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

by SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Year of Publication 10.06.2009

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Patent

Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem Aktuatorsystem

Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem Aktuatorsystem

by BERTELE, ANDREAS, KLOESCH, PETER, MAHLMANN, MARTIN, SIGEL, BENJAMIN, WEBER, JOCHEN
Year of Publication 26.08.2010

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Patent

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

by SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Year of Publication 19.06.2008

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Patent

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

by SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Year of Publication 03.04.2008

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Patent