A lithography apparatus, a method of manufacturing a device and a control program
FREDERIK ANTONIUS VAN DER ZANDEN, MARIJN WOUTERS, PIETER LEIN JOSEPH GUNTER, JORGE ALBERTO VIEYRA SALAS, BERT DIRK SCHOLTEN, VICTOR MANUEL BLANCO CARBALLO, ROLF HENDRIKUS JACOBUS CUSTERS, NORBERTUS JOSEPHUS MARTINUS VAN DEN NIEUWELAAR, YURI JOHANNES GABRIËL VAN DE VIJVER, DAVID MERRITT PHILLIPS, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, CASPER RODERIK DE GROOT, RONALD FRANK KOX
Year of Publication 08.07.2016
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Year of Publication 08.07.2016
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
NAKIBOGLU GUNES, BALTIS COEN HUBERTUS MATHEUS, TROMP SIEGFRIED ALEXANDER, VAN SOMMEREN DAAN DANIEL JOHANNES ANTONIUS, VAN DE VIJVER YURI JOHANNES GABRIEL, FRENCKEN MARK JOHANNES HERMANUS, SCHOLTEN BERT DIRK
Year of Publication 31.07.2020
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Year of Publication 31.07.2020
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Substrate table for an immersion system
SOETHOUDT, ABRAHAM ALEXANDER, SCHOLTEN, BERT DIRK, HARBERTS, DIRK WILLEM, STEVENS, LUCAS HENRICUS JOHANNES, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, PIJNENBURG, JOHANNES ADRIANUS CORNELIS MARIA, WELTERS, WILHELMUS JACOBUS JOHANNES, FERNANDEZ DIAZ, LAURA MARIA
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING A DEVICE
DE GROOT, CASPER, RODERIK, SCHOLTEN, BERT, DIRK, KOX, RONALD, FRANK, WOUTERS, MARIJN, PHILLIPS, DAVID, MERRITT, GUNTER, PIETER, LEIN, JOSEPH, VAN DE VIJVER, YURI, JOHANNES, GABRIËL, BLANCO CARBALLO, VICTOR, MANUEL, VAN DER ZANDEN, FREDERIK, ANTONIUS, EUMMELEN, ERIK, HENRICUS, EGIDIUS, CATHARINA, VAN DEN NIEUWELAAR, NORBERTUS, JOSEPHUS, MARTINUS, CUSTERS, ROLF, HENDRIKUS, JACOBUS, VIEYRA SALAS, JORGE, ALBERTO
Year of Publication 11.02.2016
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Year of Publication 11.02.2016
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Tool for modifying a support surface
MEHAGNOUL, HAROLD ANTON, SCHOLTEN, BERT DIRK, BILLEKENS, PETER ANDREAS MARIA, VAN NUENEN, CAS JOHANNES PETRUS MARIA, VERMEULEN, MARCUS MARTINUS PETRUS ADRIANUS, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, VAN VERSEVELD, HENDRIKUS THEODORUS JACOBUS FRANCISCUS, GUAN, TIAN-NAN, LINDEIJER, TJARCO
Year of Publication 01.04.2020
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Year of Publication 01.04.2020
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STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
OVERSCHIE PETER, TROMP SIEGFRIED ALEXANDER, VAN DAM TEUNIS, SPAAN-BURKE THERESA MARY, DONDERS SJOERD NICOLAAS LAMBERTUS, SCHOLTEN BERT DIRK, JANSSENS STEF MARTEN JOHAN
Year of Publication 01.03.2019
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Year of Publication 01.03.2019
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System, device and method for reconditioning a substrate support
BALTIS, COEN HUBERTUS MATHEUS, PALERMO, RALPH NICHOLAS, SCHOLTEN, BERT DIRK, MASON, CHRISTOPHER JOHN, VAN DE VIJVER, YURI JOHANNES GABRIEL, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, BOUWKNEGT, JEROEN, AKCHURIN, AYDAR, ACHANTA, SATISH, ANTONOV, PAVLO, FARLE, ANN-SOPHIE M
Year of Publication 11.07.2020
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Year of Publication 11.07.2020
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System, device and method for reconditioning a substrate support
BALTIS, COEN HUBERTUS MATHEUS, PALERMO, RALPH NICHOLAS, SCHOLTEN, BERT DIRK, MASON, CHRISTOPHER JOHN, VAN DE VIJVER, YURI JOHANNES GABRIEL, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, BOUWKNEGT, JEROEN, AKCHURIN, AYDAR, ACHANTA, SATISH, ANTONOV, PAVLO, FARLE, ANN-SOPHIE M
Year of Publication 01.09.2019
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Year of Publication 01.09.2019
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
NAKIBOGLU GUNES, BALTIS COEN HUBERTUS MATHEUS, TROMP SIEGFRIED ALEXANDER, VAN SOMMEREN DAAN DANIEL JOHANNES ANTONIUS, VAN DE VIJVER YURI JOHANNES GABRIEL, FRENCKEN MARK JOHANNES HERMANUS, SCHOLTEN BERT DIRK
Year of Publication 17.07.2018
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Year of Publication 17.07.2018
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A substrate holder, a lithographic apparatus and method of manufacturing devices
BALTIS, COEN HUBERTUS MATHEUS, FRENCKEN, MARK JOHANNES HERMANUS, TROMP, SIEGFRIED ALEXANDER, SCHOLTEN, BERT DIRK, VAN DE VIJVER, YURI JOHANNES GABRIEL, NAKIBOGLU, GUNES, VAN SOMMEREN, DAAN DANIEL JOHANNES ANTONIUS
Year of Publication 11.03.2018
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Year of Publication 11.03.2018
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LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE
SCHEIBERLICH ARIE CORNELIS, SCHREUDER ANDRE, SOETHOUDT ABRAHAM ALEXANDER, SCHOLTEN BERT DIRK, POIESZ THOMAS, TEN BRINKE GERHARD ALBERT, KAMMINGA JELMER MATTHEUS, VAN DORST RINGO PETRUS CORNELIS, JEUNINK ANDRE BERNARDUS, BALTIS COEN HUBERTUS MATHEUS, SENDEN DIRK JEROME ANDRE, TROMP SIEGFRIED ALEXANDER, DE VOS YOUSSEF KAREL MARIA, PACITTI EVELYN WALLIS, VAN DE VIJVER YURI JOHANNES GABRIEL, GERRITZEN JUSTIN JOHANNES HERMANUS, MARTENS ROBBY FRANCISCUS JOSEPHUS
Year of Publication 28.09.2018
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Year of Publication 28.09.2018
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A substrate holder, a lithographic apparatus and method of manufacturing devices
BALTIS, COEN HUBERTUS MATHEUS, FRENCKEN, MARK JOHANNES HERMANUS, TROMP, SIEGFRIED ALEXANDER, SCHOLTEN, BERT DIRK, VAN DE VIJVER, YURI JOHANNES GABRIEL, NAKIBOGLU, GUNES, VAN SOMMEREN, DAAN DANIEL JOHANNES ANTONIUS
Year of Publication 01.07.2017
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Year of Publication 01.07.2017
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Lithographic apparatus, method for unloading a substrate and method for loading a substrate
DE VOS, YOUSSEF KAREL MARIA, BALTIS, COEN HUBERTUS MATHEUS, SCHOLTEN, BERT DIRK, TROMP, SIEGFRIED ALEXANDER, VAN DORST, RINGO PETRUS CORNELIS, MARTENS, ROBBY FRANCISCUS JOSEPHUS, POIESZ, THOMAS, SCHREUDER, ANDRE, JEUNINK, ANDRE BERNARDUS, GERRITZEN, JUSTIN JOHANNES HERMANUS, KAMMINGA, JELMER MATTHEUS, SOETHOUDT, ABRAHAM ALEXANDER, VAN DE VIJVER, YURI JOHANNES GABRIEL, SENDEN, DIRK JEROME ANDRE, PACITTI, EVELYN WALLIS, TEN BRINKE, GERHARD ALBERT, SCHEIBERLICH, ARIE CORNELIS
Year of Publication 11.05.2018
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Year of Publication 11.05.2018
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Lithographic apparatus, method for unloading a substrate and method for loading a substrate
DE VOS, YOUSSEF KAREL MARIA, BALTIS, COEN HUBERTUS MATHEUS, SCHOLTEN, BERT DIRK, TROMP, SIEGFRIED ALEXANDER, VAN DORST, RINGO PETRUS CORNELIS, MARTENS, ROBBY FRANCISCUS JOSEPHUS, POIESZ, THOMAS, SCHREUDER, ANDRE, JEUNINK, ANDRE BERNARDUS, GERRITZEN, JUSTIN JOHANNES HERMANUS, KAMMINGA, JELMER MATTHEUS, SOETHOUDT, ABRAHAM ALEXANDER, VAN DE VIJVER, YURI JOHANNES GABRIEL, SENDEN, DIRK JEROME ANDRE, PACITTI, EVELYN WALLIS, TEN BRINKE, GERHARD ALBERT, SCHEIBERLICH, ARIE CORNELIS
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
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A lithography apparatus, a method of manufacturing a device and a control program
SCHOLTEN, BERT DIRK, KOX, RONALD FRANK, VIEYRA SALAS, JORGE ALBERTO, GUNTER, PIETER LEIN JOSEPH, CUSTERS, ROLF HENDRIKUS JACOBUS, VAN DER ZANDEN, FREDERIK ANTONIUS, VAN DEN NIEUWELAAR, NORBERTUS JOSEPHUS MARTINUS, BLANCO CARBALLO, VICTOR MANUEL, DE GROOT, CASPER RODERIK, PHILLIPS, DAVID MERRITT, WOUTERS, MARIJN, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARIN
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
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Lithography apparatus and method of manufacturing a device
KOX RONALD FRANK, DE GROOT CASPER RODERIK, CUSTERS ROLF HENDRIKUS JACOBUS, GUNTER PIETER LEIN JOSEPH, BLANCO CARBALLO VICTOR MANUEL, VAN DE VIJVER YURI JOHANNES GABRI L, SCHOLTEN BERT DIRK, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, PHILLIPS DAVID MERRITT, WOUTERS MARIJN, VIEYRA SALAS JORGE ALBERTO, VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS, VAN DER ZANDEN FREDERIK ANTONIUS
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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A lithography apparatus, a method of manufacturing a device and a control program
SCHOLTEN, BERT DIRK, CUSTERS, ROLF HENDRIKUS JACOBUS, VAN DEN NIEUWELAAR, NORBERTUS JOSEPHUS MARTINUS, WOUTERS, MARIJN, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARIN, KOX, RONALD FRANK, VIEYRA SALAS, JORGE ALBERTO, GUNTER, PIETER LEIN JOSEPH, VAN DER ZANDEN, FREDERIK ANTONIUS, BLANCO CARBALLO, VICTOR MANUEL, DE GROOT, CASPER RODERIK, VAN DE VIJVER, YURI, PHILLIPS, DAVID MERRITT
Year of Publication 16.05.2016
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Year of Publication 16.05.2016
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