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ANTONOV, Pavlo, BALTIS, Coen Hubertus Matheus, FARLE, Ann-Sophie m, SCHOLTEN, Bert Dirk, VAN DE VIJVER, Yuri Johannes Gabriel, ACHANTA, Satish, PALERMO, Ralph Nicholas, BOUWKNEGT, Jeroen, VAN DE WINKEL, Jimmy Matheus Wilhelmus, MASON, Christopher John, POIESZ, Thomas, AKCHURIN, Aydar
Year of Publication 25.02.2021
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Year of Publication 25.02.2021
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TOOL FOR MODIFYING A SUPPORT SURFACE
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Year of Publication 31.01.2020
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Year of Publication 31.01.2020
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, VAN SOMMEREN, Daan Daniel Johannes Antonius, TROMP, Siegfried Alexander, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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Lithography apparatus, a method of manufacturing a device and a control program
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Kox, Ronald Frank, Blanco Carballo, Victor Manuel, Vieyra Salas, Jorge Alberto, Scholten, Bert Dirk, Custers, Rolf Hendrikus Jacobus, De Groot, Casper Roderik, Phillips, David Merritt, Van der Zanden, Frederik Antonius, Van de Vijver, Yuri Johannes Gabriël, Van den Nieuwelaar, Norbertus Josephus Martinus, Gunter, Pieter Lein Joseph
Year of Publication 14.01.2020
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Year of Publication 14.01.2020
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STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
SIEGFRIED ALEXANDER TROMP, PETER OVERSCHIE, SJOERD NICOLAAS LAMBERTUS DONDERS, STEF MARTEN JOHAN JANSSENS, BERT DIRK SCHOLTEN, TEUNIS VAN DAM, THERESA MARY SPAAN-BURKE
Year of Publication 09.01.2018
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Year of Publication 09.01.2018
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STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
JANSSENS, Stef, Marten, Johan, OVERSCHIE, Peter, DONDERS, Sjoerd, Nicolaas, Lambertus, TROMP, Siegfried, Alexander, SPAAN-BURKE, Theresa, Mary, SCHOLTEN, Bert, Dirk, VAN DAM, Teunis
Year of Publication 04.01.2018
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Year of Publication 04.01.2018
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A Lithographic Apparatus and a Device Manufacturing Method
WILHELMUS JACOBUS JOHANNES WELTERS, THOMAS POIESZ, LAURA MARIA FERNANDEZ DIAZ, JIMMY MATHEUS WILHELMUS VAN DE WINKEL, DIRK WILLEM HARBERTS, JOHANNES ADRIANUS CORNELIS MARIA PIJNENBURG, BERT DIRK SCHOLTEN, LUCAS HENRICUS JOHANNES STEVENS, ABRAHAM ALEXANDER SOETHOUDT
Year of Publication 21.12.2018
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Year of Publication 21.12.2018
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, VAN SOMMEREN, Daan Daniel Johannes Antonius, TROMP, Siegfried Alexander, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 24.10.2018
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Year of Publication 24.10.2018
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LITHOGRAPHY APPARATUS, A METHOD OF MANUFACTURING A DEVICE AND A CONTROL PROGRAM
SCHOLTEN, Bert Dirk, BLANCO CARBALLO, Victor Manuel, CUSTERS, Rolf Hendrikus Jacobus, KOX, Ronald Frank, EUMMELEN, Erik Henricus Egidius Catharina, PHILLIPS, David Merritt, VAN DER ZANDEN, Frederik Antonius, GUNTER, Pieter Lein Joseph, WOUTERS, Marijn, VIEYRA SALAS, Jorge Alberto, DE GROOT, Casper Roderik, VAN DE VIJVER, Yuri Johannes Gabriël, VAN DEN NIEUWELAAR, Norbertus Josephus Martinus
Year of Publication 20.06.2019
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Year of Publication 20.06.2019
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Lithography apparatus and method of manufacturing a device
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Van Den Nieuwelaar, Norbertus Josephus Martinus, Kox, Ronald Frank, Blanco Carballo, Victor Manuel, Vieyra Salas, Jorge Alberto, Scholten, Bert Dirk, Custers, Rolf Hendrikus Jacobus, De Groot, Casper Roderik, Phillips, David Merritt, Van Der Zanden, Frederik Antonius, Van De Vijver, Yuri Johannes Gabriël, Gunter, Pieter Lein Joseph
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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System, Device and Method for Reconditioning a Substrate Support
JEROEN BOUWKNEGT, THOMAS POIESZ, JIMMY MATHEUS WILHELMUS VAN DE WINKEL, CHRISTOPHER JOHN MASON, SATISH ACHANTA, ANN-SOPHIE M. FARLE, COEN HUBERTUS MATHEUS BALTIS, PAVLO ANTONOV, YURI JOHANNES GABRIËL VAN DE VIJVER, AYDAR AKCHURIN, RALPH NICHOLAS PALERMO, BERT DIRK SCHOLTEN
Year of Publication 18.02.2019
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Year of Publication 18.02.2019
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LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE
SCHEIBERLICH, Arie Cornelis, BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, JEUNINK, Andre Bernardus, SCHREUDER, André, PACITTI, Evelyn Wallis, MARTENS, Robby Franciscus Josephus, DE VOS, Youssef Karel Maria, POIESZ, Thomas, VAN DORST, Ringo Petrus Cornelis, SENDEN, Dirk Jerome Andre, TEN BRINKE, Gerhard Albert, TROMP, Siegfried Alexander, GERRITZEN, Justin Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, KAMMINGA, Jelmer Mattheüs, SOETHOUDT, Abraham Alexander
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
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A Substrate Holder, a Lithographic Apparatus and Method of Manufacturing Devices
SIEGFRIED ALEXANDER TROMP, MARK JOHANNES HERMANUS FRENCKEN, COEN HUBERTUS MATHEUS BALTIS, YURI JOHANNES GABRIËL VAN DE VIJVER, DAAN DANIEL JOHANNES ANTONIUS VAN SOMMEREN, BERT DIRK SCHOLTEN, GÜNES NAKIBOGLU
Year of Publication 26.06.2017
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Year of Publication 26.06.2017
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
FRENCKEN, Mark, Johannes, Hermanus, VAN SOMMEREN, Daan, Daniel, Johannes, Antonius, BALTIS, Coen, Hubertus, Matheus, VAN DE VIJVER, Yuri, Johannes, Gabriël, TROMP, Siegfried, Alexander, NAKIBOGLU, Günes, SCHOLTEN, Bert, Dirk
Year of Publication 22.06.2017
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Year of Publication 22.06.2017
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LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE
SENDEN, Dirk, Jerome, Andre, SCHREUDER, André, BALTIS, Coen, Hubertus, Matheus, GERRITZEN, Justin, Johannes, Hermanus, SCHEIBERLICH, Arie, Cornelis, SOETHOUDT, Abraham, Alexander, POIESZ, Thomas, JEUNINK, Andre, Bernardus, VAN DORST, Ringo, Petrus, Cornelis, TEN BRINKE, Gerhard, Albert, DE VOS, Youssef, Karel, Maria, MARTENS, Robby, Franciscus, Josephus, PACITTI, Evelyn, Wallis, VAN DE VIJVER, Yuri, Johannes, Gabriël, KAMMINGA, Jelmer, Mattheüs, TROMP, Siegfried, Alexander, SCHOLTEN, Bert, Dirk
Year of Publication 17.08.2017
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Year of Publication 17.08.2017
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LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE
JUSTIN JOHANNES HERMANUS GERRITZEN, RINGO PETRUS CORNELIS VAN DORST, EVELYN WALLIS PACITTI, GERHARD ALBERT TEN BRINKE, BERT DIRK SCHOLTEN, SIEGFRIED ALEXANDER TROMP, THOMAS POIESZ, JELMER MATTHEÜS KAMMINGA, ANDRE BERNARDUS JEUNINK, DIRK JEROME ANDRE SENDEN, ARIE CORNELIS SCHEIBERLICH, COEN HUBERTUS MATHEUS BALTIS, YURI JOHANNES GABRIËL VAN DE VIJVER, YOUSSEF KAREL MARIA DE VOS, ROBBY FRANCISCUS JOSEPHUS MARTENS, ANDRÉ SCHREUDER, ABRAHAM ALEXANDER SOETHOUDT
Year of Publication 11.08.2017
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Year of Publication 11.08.2017
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LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING A DEVICE
EUMMELEN Erik Henricus Egidius Catharina, VAN DEN NIEUWELAAR Norbertus Josephus Martinus, CUSTERS Rolf Hendrikus Jacobus, VAN DER ZANDEN Frederik Antonius, GUNTER Pieter Lein Joseph, SCHOLTEN Bert Dirk, DE GROOT Casper Roderik, WOUTERS Marijn, PHILLIPS David Merritt, VAN DE VIJVER Yuri Johannes Gabriël, VIEYRA SALAS Jorge Alberto, KOX Ronald Frank, BLANCO CARBALLO Victor Manuel
Year of Publication 03.08.2017
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Year of Publication 03.08.2017
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Substrate table, lithographic apparatus and liquid confinement system
WILHELMUS JACOBUS JOHANNES WELTERS, LAURA MARIA FERNANDEZ DIAZ, DIRK WILLEM HARBERTS, JOHANNES ADRIANUS CORNELIS MARIA PIJNENBURG, SOETHOUDT ABRAHAM ALEXANDER, POIESZ THOMAS, BERT DIRK SCHOLTEN, LUCAS HENRICUS JOHANNES STEVENS, VAN DE WINKEL JIMMY M W
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Liquid confinement system for an immersion system and related lithographic apparatus
SOETHOUDT, ABRAHAM ALEXANDER, SCHOLTEN, BERT DIRK, HARBERTS, DIRK WILLEM, STEVENS, LUCAS HENRICUS JOHANNES, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, POIESZ, THOMAS, PIJNENBURG, JOHANNES ADRIANUS CORNELIS MARIA, WELTERS, WILHELMUS JACOBUS JOHANNES, FERNANDEZ DIAZ, LAURA MARIA
Year of Publication 11.02.2021
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Year of Publication 11.02.2021
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TOOL FOR MODIFYING A SUPPORT SURFACE
MEHAGNOUL, HAROLD ANTON, SCHOLTEN, BERT DIRK, BILLEKENS, PETER ANDREAS MARIA, VAN NUENEN, CAS JOHANNES PETRUS MARIA, VERMEULEN, MARCUS MARTINUS PETRUS ADRIANUS, GUAN, TIANNAN, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, VAN VERSEVELD, HENDRIKUS THEODORUS JACOBUS FRANCISCUS, LINDEIJER, TJARCO
Year of Publication 01.09.2020
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Year of Publication 01.09.2020
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