Search Results - "BERRY III IVAN L" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

ION INJECTOR ELECTRODE ASSEMBLY FOR ION BEAM ETCHING

ION INJECTOR ELECTRODE ASSEMBLY FOR ION BEAM ETCHING

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 31.03.2023

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Patent

PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING

PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING

by PANAGOPOULOS THEODOROS, LILL THORSTEN, BERRY III IVAN L
Year of Publication 16.10.2023

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Patent

측벽 세정을 사용한 이온 빔 에칭

측벽 세정을 사용한 이온 빔 에칭

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 13.10.2021

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Patent

고 종횡비 에칭을 위한 플라즈마 에칭 툴

고 종횡비 에칭을 위한 플라즈마 에칭 툴

by PANAGOPOULOS THEODOROS, LILL THORSTEN, BERRY III IVAN L
Year of Publication 28.10.2021

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고밀도 독립형 MRAM 디바이스들의 패터닝을 위한 시스템들 및 방법들

고밀도 독립형 MRAM 디바이스들의 패터닝을 위한 시스템들 및 방법들

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 25.09.2019

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Patent

전자 여기 원자 층 에칭

전자 여기 원자 층 에칭

by LILL THORSTEN, FISCHER ANDREAS, BERRY III IVAN L
Year of Publication 19.02.2021

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Patent

CONTROL OF INCIDENCE ANGLE OF ION BEAM ON SUBSTRATE

CONTROL OF INCIDENCE ANGLE OF ION BEAM ON SUBSTRATE

by ANGELOV IVELIN, BERRY III IVAN L
Year of Publication 22.06.2017

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Patent

열적 에칭 및 원자 층 에칭에서 에칭 특성들 예측

열적 에칭 및 원자 층 에칭에서 에칭 특성들 예측

by GOTTSCHO RICHARD A, LILL THORSTEN, FISCHER ANDREAS, BERRY III IVAN L, DRAEGER NERISSA SUE
Year of Publication 21.12.2020

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Patent

USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE

USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 02.05.2016

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Patent

ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING

ION INJECTOR AND LENS SYSTEM FOR ION BEAM MILLING

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 09.03.2016

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Patent

ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION

ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION

by LILL THORSTEN, BERRY III IVAN L
Year of Publication 09.03.2016

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Patent

PLASMA DRY STRIP PRETREATMENT TO ENHANCE ION IMPLANTED RESIST REMOVAL

PLASMA DRY STRIP PRETREATMENT TO ENHANCE ION IMPLANTED RESIST REMOVAL

by GILCHRIST GLEN, BERRY III IVAN L
Year of Publication 11.11.2015

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Patent

ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES

ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES

by LILL THORSTEN, RICCI ANTHONY, BERRY III IVAN L
Year of Publication 04.09.2017

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Patent

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON OXIDES USING NO ACTIVATION

by PARK, PIL YEON, YAQOOB FAISAL, BERRY III IVAN L
Year of Publication 14.07.2016

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Patent

DIFFERENTIALLY PUMPED REACTIVE GAS INJECTOR

DIFFERENTIALLY PUMPED REACTIVE GAS INJECTOR

by LILL THORSTEN, BERRY III IVAN L, REYNOLDS KENNETH REESE
Year of Publication 22.02.2016

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Patent

CONFORMAL DOPING USING DOPANT GAS ON HYDROGEN PLASMA TREATED SURFACE

CONFORMAL DOPING USING DOPANT GAS ON HYDROGEN PLASMA TREATED SURFACE

by HONG, YOUN GI, KIM YUNSANG, BERRY III IVAN L
Year of Publication 30.06.2017

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Patent

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES

by HEMKER DAVID J, SCHOEPP ALAN M, LILL THORSTEN, SHEN MEIHUA, BERRY III IVAN L
Year of Publication 13.07.2016

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METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON NITRIDE

METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON NITRIDE

by PARK, JOON HONG, ANGELOV IVELIN A, ZHU HELEN H, PARK, PIL YEON, YAQOOB FAISAL, MARQUEZ LINDA, BERRY III IVAN L
Year of Publication 31.08.2016

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METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

by CHOU MU HUNG, FISCHER CHRISTIAN THOMAS, WIRNSBERGER THOMAS, KUMNIG FRANZ, DYLEWICZ RAFAL RYSZARD, LAVDOVSKY NATHAN, OBWEGER RAINER, BALDARO ALESSANDRO, GLEISSNER ANDREAS, BERRY III IVAN L
Year of Publication 07.03.2016

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Patent

ION BEAM ETCHING WITH SIDEWALL CLEANING

ION BEAM ETCHING WITH SIDEWALL CLEANING

by LILL, Thorsten, BERRY, III, Ivan L
Year of Publication 19.09.2024

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Patent

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