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Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (${<}150$ μm) Solar Substrates

Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (${<}150$ μm) Solar Substrates

by Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Jpn J Appl Phys (01.10.2012)

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Journal Article

History and Religion

History and Religion

by Bernd-Christian Otto, Susanne Rau, Jörg Rüpke, Bernd-Christian Otto, Susanne Rau, Jörg Rüpke
Year of Publication 2015

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eBook

Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates

Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates

by Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)

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Journal Article

Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates

Study of SF 6 /N 2 O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates

by Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Published in Japanese Journal of Applied Physics (01.10.2012)

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Journal Article

Auflageplatte zur Auflage auf und zur Verstärkung einer Oberseite eines Werkzeugkoffers sowie Verwendung einer solchen Auflageplatte

Auflageplatte zur Auflage auf und zur Verstärkung einer Oberseite eines Werkzeugkoffers sowie Verwendung einer solchen Auflageplatte

by Rau, Bernd
Year of Publication 29.11.2018

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Patent

Beschriftungsleiste

Beschriftungsleiste

by Rau, Joachim, Rau, Bernd
Year of Publication 17.09.2020

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Patent

Device for cutting of workpiece e.g. plate-shaped metallic work piece, has light beam that is extended partially within process channel, and light source that is positioned relative to workpiece to make light beam to fall on workpiece

Device for cutting of workpiece e.g. plate-shaped metallic work piece, has light beam that is extended partially within process channel, and light source that is positioned relative to workpiece to make light beam to fall on workpiece

by RAU, BERND
Year of Publication 26.09.2013

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Patent

Method and device for ion beam processing of surfaces

Method and device for ion beam processing of surfaces

by ROTH DIETMAR, RAU BERND, MAI JOACHIM, DITTRICH KARL-HEINZ
Year of Publication 29.07.2014

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Patent

ECR-PLASMAQUELLE

ECR-PLASMAQUELLE

by MAI, JOACHIM, FELL, VALERI, RAU, BERND
Year of Publication 15.03.2011

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Patent

ECR PLASMA SOURCE

ECR PLASMA SOURCE

by MAI, JOACHIM, FELL, VALERI, RAU, BERND
Year of Publication 09.03.2011

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Patent

ECR-Plasmaquelle

ECR-Plasmaquelle

by MAI, JOACHIM, FELL, VALERI, RAU, BERND
Year of Publication 20.05.2010

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Patent

ECR PLASMA SOURCE

ECR PLASMA SOURCE

by RAU BERND, MAI JOACHIM, FELL VALERL
Year of Publication 01.10.2009

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Patent

ECR PLASMA SOURCE

ECR PLASMA SOURCE

by FELL VALERI, RAU BERND, MAI JOACHIM
Year of Publication 04.05.2009

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Patent

ECR PLASMA SOURCE

ECR PLASMA SOURCE

by MAI, JOACHIM, FELL, VALERI, RAU, BERND
Year of Publication 22.04.2009

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Patent

ECR plasma source

ECR plasma source

by JOACHIM MAI, BERND RAU, VALERI FELL
Year of Publication 14.02.2008

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Patent

METHOD AND DEVICE FOR ION BEAM PROCESSING OF SURFACES

METHOD AND DEVICE FOR ION BEAM PROCESSING OF SURFACES

by MAI, JOACHIM, DITTRICH, KARL-HEINZ, ROTH, DIETMAR, RAU, BERND
Year of Publication 30.07.2010

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Patent

Vorrichtung zur Behandlung großvolumiger Substrate im Plasma und Verfahren zur Anwendung

Vorrichtung zur Behandlung großvolumiger Substrate im Plasma und Verfahren zur Anwendung

by Spieler, Dagobert, Tobisch, Wolfgang, Dipl.-Ing, Mai, Joachim, Dipl.-Phys, Rau, Bernd, Dr.rer.nat
Year of Publication 26.04.2018

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Patent

VERFAHREN UND VORRICHTUNG ZUR IONENSTRAHLBEARBEITUNG VON OBERFLÄCHEN

VERFAHREN UND VORRICHTUNG ZUR IONENSTRAHLBEARBEITUNG VON OBERFLÄCHEN

by MAI, JOACHIM, DITTRICH, KARL-HEINZ, ROTH, DIETMAR, RAU, BERND
Year of Publication 15.12.2009

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Patent

Device for treating large substrates, e.g. glass plates, in a plasma comprises a vacuum chamber with a gas-permeable plasma sleeve which imitates the outer contour of a substrate, an antenna arrangement and further plasma-producing units

Device for treating large substrates, e.g. glass plates, in a plasma comprises a vacuum chamber with a gas-permeable plasma sleeve which imitates the outer contour of a substrate, an antenna arrangement and further plasma-producing units

by TOBISCH, WOLFGANG, MAI, JOACHIM, SPIELER, DAGOBERT, RAU, BERND
Year of Publication 10.12.2009

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Patent

METHOD AND DEVICE FOR ION BEAM PROCESSING OF SURFACES

METHOD AND DEVICE FOR ION BEAM PROCESSING OF SURFACES

by MAI, JOACHIM, DITTRICH, KARL-HEINZ, ROTH, DIETMAR, RAU, BERND
Year of Publication 02.12.2009

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Patent