APPARATUS AND METHOD FOR PROTECTION DURING SUBSTRATE PROCESSING
BENZING, JEFFREY C, BURKHART, CHRISTOPHER W, BROADBENT, ELIOT R, VAN DEN VEN, EVERHARDUS P
Year of Publication 12.07.1997
Get full text
Year of Publication 12.07.1997
Patent
Methods for making dual-damascene dielectric structures
MACWILLIAMS KENNETH P, ARCHER TIMOTHY M, BENZING JEFFREY C, HEMKER DAVE J, UGLOW JAY E, BRIGHT NICOLAS J
Year of Publication 10.03.2009
Get full text
Year of Publication 10.03.2009
Patent
Methods for making dual-damascene dielectric structures
Uglow, Jay E, Bright, Nicolas J, Hemker, Dave J, MacWilliams, Kenneth P, Benzing, Jeffrey C, Archer, Timothy M
Year of Publication 10.03.2009
Get full text
Year of Publication 10.03.2009
Patent
Methods for making dual-damascene dielectric structures
MACWILLIAMS KENNETH P, ARCHER TIMOTHY M, BENZING JEFFREY C, HEMKER DAVE J, UGLOW JAY E, BRIGHT NICOLAS J
Year of Publication 27.07.2006
Get full text
Year of Publication 27.07.2006
Patent
Methods for making dual-damascene dielectric structures
Uglow, Jay E, Bright, Nicolas J, Hemker, Dave J, MacWilliams, Kenneth P, Benzing, Jeffrey C, Archer, Timothy M
Year of Publication 13.06.2006
Get full text
Year of Publication 13.06.2006
Patent
Methods for making dual-damascene dielectric structures
MACWILLIAMS KENNETH P, ARCHER TIMOTHY M, BENZING JEFFREY C, HEMKER DAVE J, UGLOW JAY E, BRIGHT NICOLAS J
Year of Publication 13.06.2006
Get full text
Year of Publication 13.06.2006
Patent
Dual-damascene dielectric structures
MACWILLIAMS KENNETH P, ARCHER TIMOTHY M, BENZING JEFFREY C, HEMKER DAVE J, UGLOW JAY E, BRIGHT NICOLAS J
Year of Publication 21.06.2005
Get full text
Year of Publication 21.06.2005
Patent
Dual-damascene dielectric structures
Uglow, Jay E, Bright, Nicolas J, Hemker, Dave J, MacWilliams, Kenneth P, Benzing, Jeffrey C, Archer, Timothy M
Year of Publication 21.06.2005
Get full text
Year of Publication 21.06.2005
Patent
Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil
TOBIN JEFFREY A, ROUGH J. KIRKWOOD H, BROADBENT ELIOT K, BENZING JEFFREY C
Year of Publication 01.05.2001
Get full text
Year of Publication 01.05.2001
Patent