MODULAR MULTL-DIRECTIONAL GAS MIXING BLOCK
RAJ, Daemian Raj Benjamin, LANGELAND, Kurt R, ALAM, Syed A, GARIKIPATI, Kiran
Year of Publication 14.09.2023
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Year of Publication 14.09.2023
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MODULAR MULTI-DIRECTIONAL GAS MIXING BLOCK
RAJ, Daemian Raj Benjamin, ALAM, Syed A, LANGELAND, Kurt R, GARIKIPATI, Kiran
Year of Publication 04.05.2023
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Year of Publication 04.05.2023
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SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION
MUTYALA, Madhu Santosh Kumar, YU, Hang, RAJ, Daemian Raj Benjamin, DHANAKSHIRUR, Akshay, LI, Xiaopu, PEMMASANI, Saketh, KULKARNI, Mayur Govind, PADHI, Deenesh
Year of Publication 12.01.2023
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Year of Publication 12.01.2023
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프로세싱 시스템을 위한 동적 멀티 존 유동 제어
JORAPUR NIKHIL SUDHINDRARAO, BENJAMIN RAJ DAEMIAN RAJ, ADDEPALLI SAI SUSMITA, KESHRI ABHIGYAN, YAU ALLISON, SRIVASTAVA SHAILENDRA, CHICHKANOFF GREGORY EUGENE
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
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정밀 유체 전달을 위한 열적으로 안정적인 유량계들
ALAM SYED, ROCHA ALVAREZ JUAN CARLOS, JORAPUR NIKHIL SUDHINDRARAO, BENJAMIN RAJ DAEMIAN RAJ, SRIVASTAVA SHAILENDRA
Year of Publication 02.11.2020
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Year of Publication 02.11.2020
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METHOD OF REDUCING DEFECTS IN A MULTI-LAYER PECVD TEOS OXIDE FILM
YU, Hang, MUTYALA, Madhu Santosh Kumar, RAJ, Daemian Raj Benjamin, YE, Zheng John, KAMATH, Sanjay, HOWLADER, Rana, KESHRI, Abhigyan, PADHI, Deenesh
Year of Publication 28.04.2022
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Year of Publication 28.04.2022
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다수의 주파수들에서 RF 파라미터들을 제어하기 위한 방법들 및 장치
DZILNO DMITRY A, JORAPUR NIKHIL SUDHINDRARAO, ROCHA JUAN CARLOS, BENJAMIN RAJ DAEMIAN RAJ, SRIVASTAVA SHAILENDRA, YE ZHENG JOHN, MUKUTI NDANKA O
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
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POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK
ENSLOW, Kristopher R, RAJ, Daemian Raj Benjamin, HAMMOND, Edward P, YE, Zheng John, SRIVASTAVA, Shailendra, KAMATH, Sanjay G, HOWLADER, Rana, KESHRI, Abhigyan, ROCHA-ALVAREZ, Juan Carlos, DZILNO, Dmitry A, PADHI, Deenesh, HAN, Xinhai
Year of Publication 07.04.2022
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Year of Publication 07.04.2022
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만곡된 표면을 갖는 페이스플레이트
OGATA MASAKI, JORAPUR NIKHIL SUDHINDRARAO, ROCHA JUAN CARLOS, ENSLOW KRISTOPHER, ADDEPALLI SAI SUSMITA, BENJAMIN RAJ DAEMIAN RAJ, BANSAL AMIT KUMAR, SRIVASTAVA SHAILENDRA, CHICHKANOFF GREGORY EUGENE, HAN XINHAI, WANG WENJIAO
Year of Publication 15.02.2022
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Year of Publication 15.02.2022
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Modular multi-directional gas mixing block
RAJ, DAEMIAN RAJ BENJAMIN, GARIKIPATI, KIRAN, LANGELAND, KURT R, ALAM, SYED A
Year of Publication 16.08.2023
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Year of Publication 16.08.2023
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결함들이 감소된 막 스택들을 형성하는 방법
NGUYEN VU NGOC TRAN, JORAPUR NIKHIL SUDHINDRARAO, BENJAMIN RAJ DAEMIAN RAJ, KOJIRI HIDEHIRO, BALASUBRAMANIAN GANESH, CHEN YUE, JIANG ZHIJUN, OLAVE JOSE ANGELO, ROY BARMAN ARKAJIT, LIM THIAN CHOI, FUNG MIGUEL S, WANG CHUAN YING, PADHI DEENESH, HAN XINHAI
Year of Publication 25.08.2021
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Year of Publication 25.08.2021
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3D NAND 애플리케이션을 위한 막 스택 오버레이 개선
ROCHA ALVAREZ JUAN CARLOS, JORAPUR NIKHIL SUDHINDRARAO, BAEK JONGHOON, BENJAMIN RAJ DAEMIAN RAJ, ADDEPALLI SAI SUSMITA, CHICHKANOFF GREGORY EUGENE, OGATA MASAKI, ENSLOW KRISTOPHER, IBRAHIMI ZAKARIA, SRIVASTAVA SHAILENDRA, GUNG TZA JING, PADHI DEENESH, HAN XINHAI, WANG WENJIAO
Year of Publication 09.07.2021
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Year of Publication 09.07.2021
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CHAMBER CONFIGURATIONS FOR CONTROLLED DEPOSITION
RAJ, Daemian Raj Benjamin, SRIVASTAVA, Shailendra, CHICHKANOFF, Greg, JIANG, Zhijun, MA, Qiang, KESHRI, Abhigyan, BALASUBRAMANIAN, Ganesh, CHEN, Yue, JORAPUR, Nikhil Sudhindrarao, PADHI, Deenesh, ADDEPALLI, Sai Susmita, HAN, Xinhai
Year of Publication 18.02.2021
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Year of Publication 18.02.2021
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Method of reducing defects in a multi-layer pecvd teos oxide film
HOWLADER, RANA, PADHI, DEENESH, RAJ, DAEMIAN RAJ BENJAMIN, YE, ZHENG JOHN, MUTYALA, MADHU SANTOSH KUMAR, KAMATH, SANJAY, YU, HANG, KESHRI, ABHIGYAN
Year of Publication 01.08.2023
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Year of Publication 01.08.2023
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