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Year of Publication 15.11.2018
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Year of Publication 15.11.2018
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Closed analytical model of a 20 kV output voltage, 800 W output power series-parallel-resonant converter with Walton Cockroft multiplier
Rentzsch, M., Gleisberg, F., Guldner, H., Benecke, F., Ditmanson, C.
Published in 2008 IEEE Power Electronics Specialists Conference (01.06.2008)
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Year of Publication 21.04.2016
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Controlling thickness distribution in vacuum coating of substrate, comprises placing cathode and anode in vacuum chamber, where plasma discharge is generated during treating the substrate in plasma area defined between cathode and substrate
STURM, RALF, DIETSCH, TINA, BENECKE, FRANK, TEICHERT, BERND, KNOTH, THOMAS
Year of Publication 24.10.2013
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Year of Publication 24.10.2013
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Endblock-Anordnung und Prozessier-Anordnung
HEINRICH, HANS-JÜRGEN, STUDE, GERIT, BENECKE, FRANK, NIEDERHAUSEN, THOMAS, VON DER WAYDBRINK, HUBERTUS
Year of Publication 08.10.2015
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Year of Publication 08.10.2015
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Method for restoring operating state of magnetron discharge during magnetron sputtering, involves conductively switching insulated gate bipolar transistor for time periods when voltage at anode exceeds threshold values, respectively
REHN, STANELY, MIRRING, ENNO, LANG, WERNER, BENECKE, FRANK, TESCHNER, GOETZ
Year of Publication 05.05.2011
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Year of Publication 05.05.2011
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