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"BENCHER, CHRISTOPHER, D"
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"BENCHER, CHRISTOPHER, D"
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Methods and apparatus for forming a resist array using chemical mechanical planarization
by
Bencher
,
Christopher D
Year of Publication
03.07.2018
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METHODS AND APPARATUS FOR FORMING A RESIST ARRAY USING CHEMICAL MECHANICAL PLANARIZATION
by
Bencher Christopher D
Year of Publication
24.11.2016
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Self-aligned pillar patterning using multiple spacer masks
by
BENCHER
,
CHRISTOPHER D
Year of Publication
21.10.2015
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SELF-ALIGNED PILLAR PATTERNING USING MULTIPLE SPACER MASKS
by
BENCHER CHRISTOPHER D
Year of Publication
15.01.2009
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SELF-ALIGNED PILLAR PATTERNING USING MULTIPLE SPACER MASKS
by
BENCHER
,
CHRISTOPHER
,
D
Year of Publication
11.12.2008
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Double patterning with a double layer cap on carbonaceous hardmask
by
DAI HUIXIONG
,
BENCHER CHRISTOPHER D
Year of Publication
08.03.2011
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Double patterning with a double layer cap on carbonaceous hardmask
by
Bencher
,
Christopher D
,
Dai, Huixiong
Year of Publication
08.03.2011
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FREQUENCY DOUBLING USING SPACER MASK
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
13.01.2011
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Frequency tripling using spacer mask having interposed regions
by
Bencher
,
Christopher D
,
Horioka, Keiji
Year of Publication
07.12.2010
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Frequency tripling using spacer mask having interposed regions
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
07.12.2010
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Frequency doubling using spacer mask
by
Bencher
,
Christopher D
,
Horioka, Keiji
Year of Publication
05.10.2010
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Frequency doubling using spacer mask
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
05.10.2010
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Frequency Doubling Using Spacer Mask
by
BENCHER
,
CHRISTOPHER D
,
HORIOKA, KEIJI
Year of Publication
10.02.2010
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Removable amorphous carbon cmp stop
by
BENCHER CHRISTOPHER D
Year of Publication
08.03.2007
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FREQUENCY TRIPLING USING SPACER MASK HAVING INTERPOSED REGIONS
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
05.02.2009
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FREQUENCY DOUBLING USING SPACER MASK
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
08.01.2009
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FREQUENCY TRIPLING USING SPACER MASK HAVING INTERPOSED REGIONS
by
BENCHER
,
CHRISTOPHER D
,
HORIOKA, KEIJI
Year of Publication
31.12.2008
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FREQUENCY DOUBLING USING SPACER MASK
by
BENCHER
,
CHRISTOPHER D
,
HORIOKA, KEIJI
Year of Publication
31.12.2008
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FREQUENCY TRIPLING USING SPACER MASK HAVING INTERPOSED REGIONS
by
HORIOKA KEIJI
,
BENCHER CHRISTOPHER D
Year of Publication
04.12.2008
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DOUBLE PATTERNING WITH A DOUBLE LAYER CAP ON CARBONACEOUS HARDMASK
by
DAI HUIXIONG
,
BENCHER CHRISTOPHER D
Year of Publication
04.12.2008
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