Search Results - "BELLEDENT JEROME" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

by Servin, Isabelle, Tiron, Raluca, Gharbi, Ahmed, Argoud, Maxime, Jullian, Karine, Chamiot-Maitral, Gaëlle, Barros, Patricia Pimenta, Chevalier, Xavier, Belledent, Jérôme, Bossy, Xavier, Moulis, Sylvain, Navarro, Christophe, Cunge, Gilles, Barnola, Sébastien, Asai, Masaya, Pieczulewski, Charles
Published in Japanese Journal of Applied Physics (01.06.2014)

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Journal Article

Etch modeling for model-based optical proximity correction for 65nm node

Etch modeling for model-based optical proximity correction for 65nm node

by Gardin, Christian, Belledent, Jérôme, Trouiller, Yorick, Borjon, Amandine, Couderc, Christophe, Foussadier, Franck, Yesilada, Emek, Urbani, Jean-Christophe, Sundermann, Frank, Rody, Yves, Saied, Mazen, Planchot, Jonathan, Robert, Frederic
Published in Microelectronic engineering (01.05.2007)

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Journal Article

METHOD FOR DEFINING A SELF-ASSEMBLING UNIT OF A BLOCK COPOLYMER

METHOD FOR DEFINING A SELF-ASSEMBLING UNIT OF A BLOCK COPOLYMER

by BELLEDENT JEROME
Year of Publication 25.10.2016

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Patent

METHOD FOR PREPARING A PATTERN TO BE PRINTED ON A PLATE OR MASK BY ELECTRON BEAM LITHOGRAPHY, CORRESPONDING PRINTED CIRCUIT DESIGN SYSTEM AND COMPUTER PROGRAM

METHOD FOR PREPARING A PATTERN TO BE PRINTED ON A PLATE OR MASK BY ELECTRON BEAM LITHOGRAPHY, CORRESPONDING PRINTED CIRCUIT DESIGN SYSTEM AND COMPUTER PROGRAM

by BELLEDENT JEROME
Year of Publication 05.03.2014

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Patent

Patterning method using self-assembly of block copolymers

Patterning method using self-assembly of block copolymers

by PIMENTA BARROS PATRICIA, BELLEDENT JEROME
Year of Publication 24.01.2017

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Patent

IMPROVED METHOD FOR MAKING A PATTERN FROM SIDEWALL IMAGE TRANSFER

IMPROVED METHOD FOR MAKING A PATTERN FROM SIDEWALL IMAGE TRANSFER

by BELLEDENT JEROME, BARNOLA SEBASTIEN
Year of Publication 08.06.2012

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Patent

Etch modeling for model-based optical proximity correction for 65 nm node

Etch modeling for model-based optical proximity correction for 65 nm node

by Gardin, Christian, Belledent, Jérôme, Trouiller, Yorick, Borjon, Amandine, Couderc, Christophe, Foussadier, Franck, Yesilada, Emek, Urbani, Jean-Christophe, Sundermann, Frank, Rody, Yves, Saied, Mazen, Planchot, Jonathan, Robert, Frederic
Published in Microelectronic engineering (01.05.2007)

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Journal Article Conference Proceeding

LITHOGRAPHY METHOD FOR MAKING NETWORKS OF CONDUCTORS CONNECTED BY VIAS

LITHOGRAPHY METHOD FOR MAKING NETWORKS OF CONDUCTORS CONNECTED BY VIAS

by PAIN LAURENT, BELLEDENT JEROME, BARNOLA SEBASTIEN
Year of Publication 07.11.2013

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Patent

LITHOGRAPHY METHOD FOR DOUBLED PITCH

LITHOGRAPHY METHOD FOR DOUBLED PITCH

by PAIN LAURENT, BELLEDENT JEROME, BARNOLA SEBASTIEN
Year of Publication 27.09.2013

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Patent

$Analysis of the diffraction pattern for optimal assist feature placement$

Analysis of the diffraction pattern for optimal assist feature placement

by Borjon, Amandine, Belledent, Jérôme, Trouiller, Yorick, Gardin, Christian, Couderc, Christophe, Rody, Yves, Sundermann, Frank, Urbani, Jean-Christophe, Foussadier, Franck, Planchot, Jonathan, Yesilada, Emek, Montgomery, Patrick, Willkinson, Bill, Saied, Mazen, Martinelli, Catherine, Kerrien, Gurwan, Cam, Laurent Le, Vautrin, Florent, Robert, Frédéric, Schiavone, Patrick
Published in Microelectronic engineering (01.05.2007)

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Journal Article Conference Proceeding

Critical failure ORC: Improving model accuracy through enhanced model generation

Critical failure ORC: Improving model accuracy through enhanced model generation

by Borjon, Amandine, Belledent, Jérôme, Trouiller, Yorick, Patterson, Kyle, Lucas, Kevin, Gardin, Christian, Couderc, Christophe, Rody, Yves, Sundermann, Frank, Urbani, Jean-Christophe, Baron, Stanislas, Foussadier, Frank, Schiavone, Patrick
Published in Microelectronic engineering (01.04.2006)

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Journal Article Conference Proceeding

Method and system for preparing a pattern to be printed on a plate or mask by electron beam lithography

Method and system for preparing a pattern to be printed on a plate or mask by electron beam lithography

by Belledent Jerome
Year of Publication 10.01.2017

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Patent

METHOD FOR DEFINING A SELF-ASSEMBLING UNIT OF A BLOCK COPOLYMER

METHOD FOR DEFINING A SELF-ASSEMBLING UNIT OF A BLOCK COPOLYMER

by Belledent Jerome
Year of Publication 24.11.2016

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Patent

Method for estimating patterns to be printed on a plate or mask by means of electron-beam lithography and corresponding printing device

Method for estimating patterns to be printed on a plate or mask by means of electron-beam lithography and corresponding printing device

by Belledent Jerome
Year of Publication 30.08.2016

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Patent

PROCEDE DE DETERMINATION D'UN MOTIF D'AUTO-ASSEMBLAGE D'UN COPOLYMERE A BLOCS

PROCEDE DE DETERMINATION D'UN MOTIF D'AUTO-ASSEMBLAGE D'UN COPOLYMERE A BLOCS

by BELLEDENT JEROME
Year of Publication 04.03.2016

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Patent

PROCEDE DE PREPARATION D'UN MOTIF A IMPRIMER SUR PLAQUE OU SUR MASQUE PAR LITHOGRAPHIE A FAISCEAU D'ELECTRONS, SYSTEME DE CONCEPTION DE CIRCUIT IMPRIME ET PROGRAMME D'ORDINATEUR CORRESPONDANTS

PROCEDE DE PREPARATION D'UN MOTIF A IMPRIMER SUR PLAQUE OU SUR MASQUE PAR LITHOGRAPHIE A FAISCEAU D'ELECTRONS, SYSTEME DE CONCEPTION DE CIRCUIT IMPRIME ET PROGRAMME D'ORDINATEUR CORRESPONDANTS

by BELLEDENT JEROME
Year of Publication 24.07.2015

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Patent

METHOD FOR SIMULATING THE SELF-ASSEMBLY OF BLOCK COPOLYMERS IN ORDER TO DESIGN A PRINTED CIRCUIT, CORRESPONDING DESIGN METHOD, DESIGN SYSTEM AND COMPUTER PROGRAM

METHOD FOR SIMULATING THE SELF-ASSEMBLY OF BLOCK COPOLYMERS IN ORDER TO DESIGN A PRINTED CIRCUIT, CORRESPONDING DESIGN METHOD, DESIGN SYSTEM AND COMPUTER PROGRAM

by BELLEDENT JEROME
Year of Publication 09.04.2015

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Patent

PROCEDE D'ESTIMATION DE MOTIFS A IMPRIMER SUR PLAQUE OU SUR MASQUE PAR LITHOGRAPHIE A FAISCEAU D'ELECTRONS ET DISPOSITIF D'IMPRESSION CORRESPONDANT

PROCEDE D'ESTIMATION DE MOTIFS A IMPRIMER SUR PLAQUE OU SUR MASQUE PAR LITHOGRAPHIE A FAISCEAU D'ELECTRONS ET DISPOSITIF D'IMPRESSION CORRESPONDANT

by BELLEDENT JEROME
Year of Publication 27.02.2015

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Patent

SIMULATION DES EFFETS DU BRUIT DE GRENAILLE SUR UN PROCEDE DE LITHOGRAPHIE PAR FAISCEAU DE PARTICULES ET NOTAMMENT DE LITHOGRAPHIE ELECTRONIQUE

SIMULATION DES EFFETS DU BRUIT DE GRENAILLE SUR UN PROCEDE DE LITHOGRAPHIE PAR FAISCEAU DE PARTICULES ET NOTAMMENT DE LITHOGRAPHIE ELECTRONIQUE

by BELLEDENT JEROME
Year of Publication 27.02.2015

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Patent

PARTICLE BEAM LITHOGRAPHY PROCESS AND ESPECIALLY SIMULATION OF EFFECT OF SHOT NOISE IN PARTICLE BEAM LITHOGRAPHY PROCESS

PARTICLE BEAM LITHOGRAPHY PROCESS AND ESPECIALLY SIMULATION OF EFFECT OF SHOT NOISE IN PARTICLE BEAM LITHOGRAPHY PROCESS

by BELLEDENT JEROME
Year of Publication 03.07.2014

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Patent

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