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Year of Publication 11.05.2005
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BARRIER STACK WITH IMPROVED BARRIER PROPERTIES
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Year of Publication 13.10.2004
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Barrier stack with improved barrier properties
NAGEL NICOLAS, YAMAKAWA KOJI, HILLIGER ANDREAS, IMAI KEITARO, MOON BUM KI, BEITEL GERHARD ADOLF
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Year of Publication 07.09.2004
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Barrier stack with improved barrier properties
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Year of Publication 07.09.2004
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Barrier stack with improved barrier properties
BEITEL, GERHARD ADOLF, NAGEL, NICOLAS, MOON, BUM-KI, IMAI, KEITARO, HILLIGER, ANDREAS
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Year of Publication 11.01.2004
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BARRIER STACK WITH IMPROVED BARRIER PROPERTIES
NAGEL, NICOLAS, MOON, BUM-KI, BEITEL, GERHARD, ADOLF, IMAI, KEITARO, YAMAKAWA, KOJI, HILLIGER, ANDREAS
Year of Publication 24.12.2003
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Year of Publication 24.12.2003
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BARRIER STACK WITH IMPROVED BARRIER PROPERTIES
NAGEL, NICOLAS, MOON, BUM-KI, BEITEL, GERHARD, ADOLF, IMAI, KEITARO, YAMAKAWA, KOJI, HILLIGER, ANDREAS
Year of Publication 24.07.2003
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Year of Publication 24.07.2003
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Barrier stack with improved barrier properties
NAGEL NICOLAS, YAMAKAWA KOJI, HILLIGER ANDREAS, IMAI KEITARO, MOON BUM KI, BEITEL GERHARD ADOLF
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Year of Publication 17.07.2003
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Method for reducing contamination of tools in semiconductor processing
ZHUANG HAOREN, HORNIK KARL, NATORI KATSUAKI, MOON BUM-KI, TSUNASHIMA YOSHITAKA, YABUKI MOTO, BEITEL GERHARD ADOLF
Year of Publication 26.01.2005
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Year of Publication 26.01.2005
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Barrier stack with improved barrier properties
BEITEL, GERHARD ADOLF, NAGEL, NICOLAS, MOON, BUM-KI, IMAI, KEITARO, KOJI YAMAKAWA, HILLIGER, ANDREAS
Year of Publication 16.09.2003
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Year of Publication 16.09.2003
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