Radiation source having debris control
De Jong, Arjen Teake, Kleemans, Niek Antonius Jacobus Maria, Verbraak, Harald Ernest, Beijsens, Rolf Theodorus Nicolaas, Van Asten, Nicolaas Antonius Allegondus Johannes, Seroglazov, Pavel, Feenstra, Kornelis Frits, Jilisen, Reinier Theodorus Martinus, Nikipelov, Andrey
Year of Publication 10.03.2020
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Year of Publication 10.03.2020
Patent
LITHOGRAPHIC APPARATUS
VAN ASTEN, NICOLAAS, VAN AERLE, NICK, BAAS, GERARDUS, EURLINGS, MARKUS, BEIJSENS, ROLF, KOLESNYCHENKO, ALEKSEY, KLEEMANS, NIEK
Year of Publication 30.05.2014
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Year of Publication 30.05.2014
Patent
LITHOGRAPHIC APPARATUS
VAN ASTEN, NICOLAAS, VAN AERLE, NICK, BAAS, GERARDUS, EURLINGS, MARKUS, BEIJSENS, ROLF, KOLESNYCHENKO, ALEKSEY, KLEEMANS, NIEK
Year of Publication 03.01.2014
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Year of Publication 03.01.2014
Patent
LITHOGRAPHIC APPARATUS
BAAS GERARDUS, KLEEMANS NIEK, EURLINGS MARKUS, KOLESNYCHENKO ALEKSEY, BEIJSENS ROLF, AERLE NICK, ASTEN NICOLAAS
Year of Publication 31.12.2013
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Year of Publication 31.12.2013
Patent
RADIATION SOURCE
KLEEMANS Niek Antonius Jacobus Maria, BEIJSENS Rolf Theodorus Nicolaas, VERBRAAK Harald Ernest, FEENSTRA Kornelis Frits, SEROGLAZOV Pavel, NIKIPELOV Andrey, VAN ASTEN Nicolaas Antonius Allegondus Johannes, DE JONG Arjen Teake, JILISEN Reinier Theodorus Martinus
Year of Publication 22.09.2016
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Year of Publication 22.09.2016
Patent
RADIATION SOURCE
JILISEN, REINIER, THEODORUS, MARTINUS, KLEEMANS, NIEK, ANTONIUS, JACOBUS, MARIA, VERBRAAK, HARALD, ERNEST, DE JONG, ARJEN, TEAKE, FEENSTRA, KORNELIS, FRITS, NIKIPELOV, ANDREY, SEROGLAZOV, PAVEL, VAN ASTEN, NICOLAAS, ANTONIUS, ALLEGONDUS, JOHANNES, BEIJSENS, ROLF, THEODORUS, NICOLAAS
Year of Publication 21.05.2015
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Year of Publication 21.05.2015
Patent
Lithographic apparatus
VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS J, BEIJSENS, ROLF THEODORUS NICOLAAS, EURLINGS, MARKUS FRANCISCUS ANTONIUS, KOLESNYCHENKO, ALEKSEY YURIEVICH, KLEEMANS, NIEK ANTONIUS JACOBUS MARIA, VAN AERLE, NICOLAAS ALDEGONDA JAN MARIA, BAAS, GERARDUS WILHELMUS PETRUS
Year of Publication 16.01.2014
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Year of Publication 16.01.2014
Patent