에지 링 및 바이어스 전극 기하학적 구조를 사용한 막 두께 균일성 개선
BEHERA SWAYAMBHU PRASAD, LIU WEI, LO KIN PONG, NAGORNY VLADIMIR, HWANG BERNARD L, ABRAHAM JACOB, BEVAN MALCOLM J, GUARINI THERESA KRAMER
Year of Publication 27.02.2023
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Year of Publication 27.02.2023
Patent
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA SWAYAMBHU PRASAD, KULSHRESHTHA PRASHANT KUMAR, ROCHA ALVAREZ JUAN CARLOS, LEE KWANGDUK DOUGLAS, CHEN JIAN J, BALASUBRAMANIAN GANESH, KIM BOK HOEN, YE ZHENG JOHN
Year of Publication 03.05.2022
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Year of Publication 03.05.2022
Patent
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA SWAYAMBHU PRASAD, KULSHRESHTHA PRASHANT KUMAR, ROCHA ALVAREZ JUAN CARLOS, LEE KWANGDUK DOUGLAS, CHEN JIAN J, BALASUBRAMANIAN GANESH, KIM BOK HOEN, YE ZHENG JOHN
Year of Publication 29.07.2020
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Year of Publication 29.07.2020
Patent
Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides
BEHERA, Swayambhu, WILKS, Justin, DOWBEN, Peter A, DRIVER, M. Sky, CARUSO, A. N, KELBER, Jeffry A
Published in Surface science (01.10.2010)
Published in Surface science (01.10.2010)
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Journal Article
Photo-induced site-specific nitridation of plasma-deposited B 10C 2H x films: A new pathway toward post-deposition doping of semiconducting boron carbides
Behera, Swayambhu, Wilks, Justin, Dowben, Peter A., Driver, M. Sky, Caruso, A.N., Kelber, Jeffry A.
Published in Surface science (2010)
Published in Surface science (2010)
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Journal Article
Photofragmentation of the closo -Carboranes Part II: VUV Assisted Dehydrogenation in the closo -Carboranes and Semiconducting B 10 C 2 H x Films
Rühl, Eckart, Riehs, Norman F., Behera, Swayambhu, Wilks, Justin, Liu, Jing, Jochims, H.-W., Caruso, Anthony N., Boag, Neil M., Kelber, Jeffry A., Dowben, Peter A.
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
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Journal Article
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA SWAYAMBHU PRASAD, KULSHRESHTHA PRASHANT KUMAR, ROCHA ALVAREZ JUAN CARLOS, LEE KWANGDUK DOUGLAS, CHEN JIAN J, BALASUBRAMANIAN GANESH, KIM BOK HOEN, YE ZHENG JOHN
Year of Publication 24.04.2017
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Year of Publication 24.04.2017
Patent
LAYER-BY-LAYER DEPOSITION OF CARBON-DOPED OXIDE FILMS
PANDIT MANDAR B, BEHERA SWAYAMBHU P, REILLY PATRICK, PARK HEUNG LAK, MANNA PRAMIT, KIM BOK HOEN, WITTY DEREK R, PADHI DEENESH, SUMMAN TERSEM, SHAIKH SHAHID
Year of Publication 24.11.2015
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Year of Publication 24.11.2015
Patent
METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSILE STRESS AT ELEVATED TEMPERATURES IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM
ROCHA ALVAREZ JUAN CARLOS, KULSHRESHTHA PRASHANT KUMAR, PINSON JAY D. II, BALASUBRAMANIAN GANESH, ZHOU JIANHUA, PONNEKANTI HARI K, BEHERA SWAYAMBHU P, DUAN REN GUAN, LEE KWANGDUK DOUGLAS, FOSTER JASON K, HANAWA HIROJI, LIN XING, KIM BOK HOEN, HALLER UWE P, YE ZHENG JOHN, HA SUNGWON, SRINIVASAN MUKUND
Year of Publication 18.04.2017
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Year of Publication 18.04.2017
Patent
Photofragmentation of the closo-carboranes part II: VUV assisted dehydrogenation in the closo-carboranes and semiconducting B10C2H(x) films
Rühl, Eckart, Riehs, Norman F, Behera, Swayambhu, Wilks, Justin, Liu, Jing, Jochims, H-W, Caruso, Anthony N, Boag, Neil M, Kelber, Jeffry A, Dowben, Peter A
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
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Journal Article
Edge ring
Behera, Swayambhu Prasad, Guarini, Theresa Kramer, Abraham, Jacob, Bevan, Malcolm J, Lo, Kin Pong, Liu, Wei, Nagorny, Vladimir, Hwang, Bernard L
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
Patent
Photofragmentation of the closo-Carboranes Part II: VUV Assisted Dehydrogenation in the closo-Carboranes and Semiconducting B10C2H x Films
Rühl, Eckart, Riehs, Norman F, Behera, Swayambhu, Wilks, Justin, Liu, Jing, Jochims, H.-W, Caruso, Anthony N, Boag, Neil M, Kelber, Jeffry A, Dowben, Peter A
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.07.2010)
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Journal Article
HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA, Swayambhu Prasad, KIM, Bok Hoen, YE, Zheng John, ROCHA-ALVAREZ, Juan Carlos, CHEN, Jian J, KULSHRESHTHA, Prashant, LEE, Kwangduk Douglas, BALASUBRAMANIAN, Ganesh
Year of Publication 21.11.2019
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Year of Publication 21.11.2019
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