Direct Force-Reflecting Two-Layer Approach for Passive Bilateral Teleoperation With Time Delays
Heck, Dennis, Saccon, Alessandro, Beerens, Ruud, Nijmeijer, Henk
Published in IEEE transactions on robotics (01.02.2018)
Published in IEEE transactions on robotics (01.02.2018)
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Journal Article
Reset PID Design for Motion Systems With Stribeck Friction
Beerens, Ruud, Bisoffi, Andrea, Zaccarian, Luca, Nijmeijer, Henk, Heemels, Maurice, van de Wouw, Nathan
Published in IEEE transactions on control systems technology (01.01.2022)
Published in IEEE transactions on control systems technology (01.01.2022)
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기판 지지부, 리소그래피 장치, 전하 분포를 조작하기 위한 방법 및 기판을 준비하기 위한 방법
HARBERTS DIRK WILLEM, BEERENS RUUD ANTONIUS CATHARINA MARIA, VAN DER VOORT DENNIS DOMINIC, STEVENS LUCAS HENRICUS JOHANNES, WINKELS KOEN GERHARDUS, LEENKNEGT GEORGE ALOIS LEONIE, BOS EDWIN JOHANNES CORNELIS, TEN KATE NICOLAAS
Year of Publication 15.07.2022
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Year of Publication 15.07.2022
Patent
Recursive Learning of Feedforward Parameters in High-Tech Motion Systems: An Experimental Case Study
Van Keulen, Thijs, Kleefstra, Bram, Beerens, Ruud
Published in 2024 European Control Conference (ECC) (25.06.2024)
Published in 2024 European Control Conference (ECC) (25.06.2024)
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Conference Proceeding
레이저 집속 모듈
BEERENS RUUD ANTONIUS CATHARINA MARIA, ERGIN TOLGA MEHMET, YUAN JIAYUE, KLUNDER DERK JAN WILFRED, BAUMER STEFAN MICHAEL BRUNO, SPERLING FRANK BERNHARD, WITTE JASPER, BOONEN NICO JOHANNES ANTONIUS HUBERTUS, LAMBERT MARTIN ANTON, PIEHLER STEFAN, HOPF ANDREAS KRISTIAN, RANJAN MANISHA, TYCHKOV ANDREY SERGEEVICH
Year of Publication 25.02.2022
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Year of Publication 25.02.2022
Patent
Stability and Performance Assessment of a MIMO HIGS-based Controller Design
Beerens, Ruud, Konings, Pieter, Heertjes, Marcel, Eijnden, Sebastiaan van den
Published in 2024 European Control Conference (ECC) (25.06.2024)
Published in 2024 European Control Conference (ECC) (25.06.2024)
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Conference Proceeding
OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
BEERENS RUUD ANTONIUS CATHARINA MARIA, HENRICUS GERARDUS TEGENBOSCH, KLEIJN JACOB, ALEXANDER MATTHIJS STRUYCKEN, IVO VANDERHALLEN
Year of Publication 25.12.2014
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Year of Publication 25.12.2014
Patent
Set-point Control of Motion Systems with Uncertain Set-valued Stribeck Friction
Beerens, Ruud, Nijmeijer, Henk, Heemels, Maurice, van de Wouw, Nathan
Published in IFAC-PapersOnLine (01.07.2017)
Published in IFAC-PapersOnLine (01.07.2017)
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Journal Article
LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC PROJECTION METHOD
BEERENS RUUD ANTONIUS CATHARINA MARIA, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 30.08.2012
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Year of Publication 30.08.2012
Patent
ROTATABLE FRAME FOR A LITHOGRAPHIC APPARATUS
ZAAL KOEN, PHILIPS DANNY, TIMMERMANS ROGER, BEERENS RUUD, DE JAGER PIETER, BLEEKER ARNO, CASTENMILLER THOMAS, CADEE THEODORUS PETRUS MARIA, MULDER HEINE
Year of Publication 18.12.2014
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Year of Publication 18.12.2014
Patent
STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM
WESTERLAKEN JAN STEVEN CHRISTIAAN, BEERENS RUUD ANTONIUS CATHARINA MARIA, ZAAL KOEN JACOBUS JOHANNES MARIA, VAN LIESHOUT RICHARD HENRICUS ADRIANUS, VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS, RUTTEN ROB JOHAN THEODOOR
Year of Publication 26.05.2015
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Year of Publication 26.05.2015
Patent
Set-point Control of Motion Systems with Uncertain Set-valued Stribeck FrictionThis research is supported by the Dutch Technology Foundation (STW, project 13896)
Beerens, Ruud, Nijmeijer, Henk, Heemels, Maurice, van de Wouw, Nathan
Published in IFAC-PapersOnLine (01.07.2017)
Published in IFAC-PapersOnLine (01.07.2017)
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Journal Article
POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
JEUNINK ANDRE BERNARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, VAN LIESHOUT RICHARD HENRICUS ADRIANUS, VAN DE WAL MARINUS MARIA JOHANNES, AANGENENT WILHELMUS HENRICUS THEODORUS MARIA, VAN DER HOEVEN SAARTJE WILLEMIJN, VAN DE GROES HENRICUS MARTINUS JOHANNES
Year of Publication 20.03.2015
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Year of Publication 20.03.2015
Patent
OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 25.03.2011
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Year of Publication 25.03.2011
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
BEERENS RUUD, FISCHER OLOF, BUTLER HANS, HOEKS MARTINUS, BLEEKER ARNO, VAN DER WIJST MARC, AANGENENT WOUTER, ZAAL KOEN, VAN DER SCHOOT HARMEN, SLAGHEKKE BERNARDUS, TINNEMANS PATRICIUS, BOSCH NIELS JOHANNES MARIA, HOL SVEN ANTOIN JOHAN, HENNUS PIETER, CADEE THEODORUS PETRUS MARIA
Year of Publication 04.09.2014
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Year of Publication 04.09.2014
Patent