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Year of Publication 24.02.2011
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Year of Publication 27.05.2015
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Gas bearing electrostatic chuck
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Year of Publication 19.05.2015
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Ion beam angle calibration and emittance measurement system for ribbon beams
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Year of Publication 01.05.2012
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Ion beam angle calibration and emittance measurement system for ribbon beams
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Year of Publication 01.05.2012
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GAS BEARING ELETROSTATIC CHUCK
GILLESPIE, JOSEPH, NAYFEH, SAMIR, LEE, W, LAFONTAINE, MARVIN, SLOCUM, ALEXANDER, PUROHIT, ASHWIN, BECKEL, DONOVAN, TAO, TENG, CHAO
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Year of Publication 05.01.2011
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ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS
EIDE, PAUL, POLNER, DONALD, SAKASE, TAKAO, FARLEY, MARVIN, SMICK, THEODORE, RYDING, GEOFFREY, FREER, BRIAN, HORNER, RONALD, EISNER, EDWARD, LAMBERT, MARK, BECKEL, DONOVAN
Year of Publication 30.11.2011
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Year of Publication 30.11.2011
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GAS BEARING ELETROSTATIC CHUCK
GILLESPIE, JOSEPH, NAYFEH, SAMIR, LEE, W, LAFONTAINE, MARVIN, SLOCUM, ALEXANDER, PUROHIT, ASHWIN, BECKEL, DONOVAN, TAO, TENG, CHAO
Year of Publication 30.12.2009
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Year of Publication 30.12.2009
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GAS BEARING ELETROSTATIC CHUCK
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Year of Publication 05.11.2009
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Year of Publication 06.08.2009
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WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
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Year of Publication 13.05.2009
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ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS
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Year of Publication 29.07.2010
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Gas bearing electrostatic chuck
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ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS
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Year of Publication 22.07.2010
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GAS BEARING ELECTROSTATIC CHUCK
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Year of Publication 05.11.2009
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Workpiece handling scan arm for ion implantation system
PATHAK SHANTANU, PHARAND MICHEL, LAFONTAINE MARVIN, ARSENEAULT WAYNE, MITCHELL ROBERT, EIRIKSSON ARI, WEED STEVEN, FOLEY JOSEPH DANIEL, PUROHIT ASHWIN, BECKEL DONOVAN
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Year of Publication 14.07.2009
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Workpiece handling scan arm for ion implantation system
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Year of Publication 14.07.2009
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Gas bearing eletrostatic chuck and method for clamping workpieces
NAYFEH SAMIR, LEE W, LAFONTAINE MARVIN, GILLESPIE JOSEPH, TAO TENG CHAO, SLOCUM ALEXANDER, PUROHIT ASHWIN, BECKEL DONOVAN
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Year of Publication 07.05.2014
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Workpiece handling scan arm for ion implantation system
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Year of Publication 11.02.2014
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