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"BAUMER, Florian"
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EUV 장치용 조명 시스템을 복원하는 방법 및 검출기 모듈
by
BAUMER FLORIAN
Year of Publication
10.06.2020
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EUV 장치용 조명 시스템을 제조하기 위한 방법
by
BAUMER FLORIAN
,
LICHTENTHAELER JOERG
Year of Publication
21.04.2021
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Smart Chassis Sensor - the Suspension Ball Joint as a Data Source
by
Bäumer
,
Florian
,
Löwen, Benjamin
,
Hagemes, Jörg
Published in
ATZelectronics worldwide
(08.05.2024)
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투영 노광 장치의 미러를 교체하기 위한 방법 및 방법을 수행하기 위한 위치 및 배향 데이터 측정 디바이스
by
MUELLER ULRICH
,
PETRI CHRISTOPH
,
RUNDE DANIEL
,
BAUMER FLORIAN
Year of Publication
11.08.2021
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Method for restoring an illumination system for an EUV apparatus, and detector module
by
Baumer
,
Florian
Year of Publication
29.06.2021
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Sistema y procedimiento para analizar un haz de luz guiado por una óptica de guía de haz
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
12.03.2024
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Metrology system and method for measuring an excitation laser beam in an EUV plasma source
by
Manger, Matthias
,
Baumer
,
Florian
Year of Publication
05.03.2024
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SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT
by
BAUMER
,
FLORIAN
,
MANGER, MATTHIAS
Year of Publication
26.02.2024
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METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
14.02.2024
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METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
29.11.2023
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SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
25.10.2023
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ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FACET MIRRORS
by
HAUF, Markus
,
BAUMER
,
Florian
Year of Publication
12.10.2023
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Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit
by
Manger, Matthias
,
Baumer
,
Florian
Year of Publication
22.08.2023
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METHOD FOR RESTORING AN ILLUMINATION SYSTEM FOR AN EUV APPARATUS, AND DETECTOR MODULE
by
Baumer
,
Florian
Year of Publication
06.08.2020
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SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
09.08.2023
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SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM CONDUCTED BY A BEAM-CONDUCTING OPTICAL UNIT
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
09.08.2023
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METHOD FOR RESTORING AN ILLUMINATION SYSTEM FOR AN EUV APPARATUS, AND DETECTOR MODULE
by
BAUMER
,
Florian
Year of Publication
02.05.2019
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DEVICE AND METHOD FOR MEASURING THE BEAM ANGLE OF A LIGHT BEAM GUIDED BY A BEAM GUIDING OPTICAL UNIT
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
11.08.2021
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METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM IN AN EUV PLASMA SOURCE
by
MANGER, Matthias
,
BAUMER
,
Florian
Year of Publication
11.08.2021
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DEVICE AND METHOD FOR MEASURING THE BEAM ANGLE OF A LIGHT BEAM GUIDED BY A BEAM GUIDING OPTICAL UNIT
by
Manger, Matthias
,
Baumer
,
Florian
Year of Publication
15.07.2021
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