Determination of recipes for manufacturing semiconductor devices
Alden, Emily Ann, Sawlani, Kapil Umesh, Danek, Michal, Basu, Atashi, Fried, David Michael
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
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Doped and undoped vanadium oxides for low-k spacer applications
Venkatasubramanian, Eswaranand, Chan, Kelvin, Mallick, Abhijit Basu, Basu, Atashi, Gandikota, Srinivas
Year of Publication 04.04.2023
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Year of Publication 04.04.2023
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DETERMINATION OF RECIPE FOR MANUFACTURING SEMICONDUCTOR
Alden, Emily Ann, Sawlani, Kapil Umesh, Danek, Michal, Basu, Atashi, Fried, David Michael
Year of Publication 24.11.2022
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Year of Publication 24.11.2022
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DEPOSITION AND TREATMENT OF FILMS FOR PATTERNING
DUAN, Ziqing, BASU, Atashi, MALLICK, Abhijit Basu, GANDIKOTA, Srinivas
Year of Publication 28.10.2020
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Year of Publication 28.10.2020
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Deposition and treatment of films for patterning
Duan, Ziqing, Mallick, Abhijit Basu, Basu, Atashi, Gandikota, Srinivas
Year of Publication 30.06.2020
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Year of Publication 30.06.2020
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Methods and materials for modifying the threshold voltage of metal oxide stacks
Ma, Paul F, Krishnan, Siddarth, Basu, Atashi, Sathiyanarayanan, Rajesh
Year of Publication 07.04.2020
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Year of Publication 07.04.2020
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Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
Venkatasubramanian, Eswaranand, Chan, Kelvin, Mallick, Abhijit Basu, Basu, Atashi, Gandikota, Srinivas
Year of Publication 18.11.2021
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Year of Publication 18.11.2021
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Doped and undoped vanadium oxides for low-k spacer applications
Venkatasubramanian, Eswaranand, Chan, Kelvin, Mallick, Abhijit Basu, Basu, Atashi, Gandikota, Srinivas
Year of Publication 17.08.2021
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Year of Publication 17.08.2021
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