Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS
Zamora, I., Ledesma, E., Uranga, A., Barniol, N.
Published in IEEE electron device letters (01.07.2022)
Published in IEEE electron device letters (01.07.2022)
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Journal Article
Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay
Riverola, M., Uranga, A., Torres, F., Barniol, N.
Published in Microelectronic engineering (15.05.2018)
Published in Microelectronic engineering (15.05.2018)
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Journal Article
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
Uranga, A., Verd, J., Marigó, E., Giner, J., Muñóz-Gamarra, J.L., Barniol, N.
Published in Sensors and actuators. A. Physical. (01.08.2013)
Published in Sensors and actuators. A. Physical. (01.08.2013)
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Journal Article
A monolithically integrated torsional CMOS-MEMS relay
Riverola, M, Sobreviela, G, Torres, F, Uranga, A, Barniol, N
Published in Journal of micromechanics and microengineering (05.10.2016)
Published in Journal of micromechanics and microengineering (05.10.2016)
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Journal Article
Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution
Verd, J, Sansa, M, Uranga, A, Perez-Murano, F, Segura, J, Barniol, N
Published in Lab on a chip (01.01.2011)
Published in Lab on a chip (01.01.2011)
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Journal Article
Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
Verd, J., Uranga, A., Abadal, G., Teva, J.L., Torres, F., Lopez, J.L., Perez-Murano, E., Esteve, J., Barniol, N.
Published in IEEE electron device letters (01.02.2008)
Published in IEEE electron device letters (01.02.2008)
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Journal Article
Integration of NEMS resonators in a 65 nm CMOS technology
Munoz-Gamarra, J L, Alcaine, P, Marigo, E, Giner, J, Uranga, A, Esteve, J, Barniol, N
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Lopez, J L, Verd, J, Teva, J, Murillo, G, Giner, J, Torres, F, Uranga, A, Abadal, G, Barniol, N
Published in Journal of micromechanics and microengineering (01.01.2009)
Published in Journal of micromechanics and microengineering (01.01.2009)
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Journal Article
A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High- Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators
Lopez, J.L., Verd, J., Uranga, A., Giner, J., Murillo, G., Torres, F., Abadal, G., Barniol, N.
Published in IEEE electron device letters (01.07.2009)
Published in IEEE electron device letters (01.07.2009)
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Journal Article
Packaged CMOS-MEMS free-free beam oscillator
Marigó, E, Verd, J, López, J L, Uranga, A, Barniol, N
Published in Journal of micromechanics and microengineering (01.11.2013)
Published in Journal of micromechanics and microengineering (01.11.2013)
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Journal Article
Integrated CMOS amplifier for ENG signal recording
Uranga, A., Navarro, X., Barniol, N.
Published in IEEE transactions on biomedical engineering (01.12.2004)
Published in IEEE transactions on biomedical engineering (01.12.2004)
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Journal Article
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
Verd, J., Uranga, A., Teva, J., Lopez, J.L., Torres, F., Esteve, J., Abadal, G., Perez-Murano, F., Barniol, N.
Published in IEEE electron device letters (01.06.2006)
Published in IEEE electron device letters (01.06.2006)
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Journal Article
Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection
Abadal, G, Davis, Z J, Helbo, B, Borrisé, X, Ruiz, R, Boisen, A, Campabadal, F, Esteve, J, Figueras, E, Pérez-Murano, F, Barniol, N
Published in Nanotechnology (01.06.2001)
Published in Nanotechnology (01.06.2001)
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Journal Article
Conference Proceeding
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
GINER, J, URANGA, A, MUNOZ-GAMARRA, J. L, MARIGO, E, BARNIOL, N
Published in Electronics letters (26.04.2012)
Published in Electronics letters (26.04.2012)
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Journal Article
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
MARIGO FERRER, Eloi, MUNOZ-GAMARRA, J. L, GINER, J, URANGA, A, BARNIOL, N
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Conference Proceeding
Zero-level packaging of MEMS in standard CMOS technology
Marigó, E, Lopez, J L, Murillo, G, Torres, F, Giner, J, Uranga, A, Abadal, G, Esteve, J, Barniol, N
Published in Journal of micromechanics and microengineering (01.06.2010)
Published in Journal of micromechanics and microengineering (01.06.2010)
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Journal Article
Conference Proceeding
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
Verd, J., Abadal, G., Teva, J., Gaudo, M.V., Uranga, A., Borrise, X., Campabadal, F., Esteve, J., Costa, E.F., Perez-Murano, F., Davis, Z.J., Forsen, E., Boisen, A., Barniol, N.
Published in Journal of microelectromechanical systems (01.06.2005)
Published in Journal of microelectromechanical systems (01.06.2005)
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