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Micro-electro-mechanical systems (MEMS) device and system and method of producing the same

Micro-electro-mechanical systems (MEMS) device and system and method of producing the same

by BAR-SADEH EYA,TALALAEVSKI ALEXANDER,GINSBURG EYAL
Year of Publication 26.04.2006

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Patent

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND SYSTEM AND METHOD OF PRODUCING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND SYSTEM AND METHOD OF PRODUCING THE SAME

by BAR-SADEH, EYA, GINSBURG, EYAL, TALALAEVSKI, ALEXANDER
Year of Publication 28.12.2005

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Patent

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND SYSTEM AND METHOD OF PRODUCING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND SYSTEM AND METHOD OF PRODUCING THE SAME

by BAR-SADEH, EYA, TALALYEVSKY, ALEXANDER, GINSBURG, EYAL
Year of Publication 04.11.2004

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Patent

Micro-electro-mechanical systems (MEMS) device and system and method of producing the same

Micro-electro-mechanical systems (MEMS) device and system and method of producing the same

by GINSBURG EYAL, BAR-SADEH EYA, TALALAEVSKI ALEXANDER
Year of Publication 18.08.2010

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Patent