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Year of Publication 19.05.2011
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Year of Publication 19.05.2011
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PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
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Year of Publication 14.06.2017
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Protection module for EUV lithography apparatus, and EUV lithography apparatus
EHM DIRK HEINRICH, KUGLER JENS, BANNEY BEN, LAUFER TIMO, NIEKEN ULRICH, KELLER FRANZ
Year of Publication 15.04.2014
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Year of Publication 15.04.2014
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PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
EHM DIRK HEINRICH, KUGLER JENS, BANNEY BEN, LAUFER TIMO, NIEKEN ULRICH, KELLER FRANZ
Year of Publication 08.09.2011
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Year of Publication 08.09.2011
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PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
BANNEY, BEN, LAUFER, TIMO, NIEKEN, ULRICH, EHM, DIRK, HEINRICH, KUGLER, JENS, KELLER, FRANZ
Year of Publication 22.06.2011
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Year of Publication 22.06.2011
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PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
BANNEY, BEN, LAUFER, TIMO, NIEKEN, ULRICH, EHM, DIRK, HEINRICH, KUGLER, JENS, KELLER, FRANZ
Year of Publication 11.03.2010
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Year of Publication 11.03.2010
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HEAT EXCHANGER FOR AN ELECTRONIC HEAT PUMP
BANNEY, BEN, MCDONALD, DAVID, BATCHELOR, ANDREW, W, CHANDRATILLEKE, TILAK, T
Year of Publication 28.09.2005
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Year of Publication 28.09.2005
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A heat exchanger
DAVID MCDONALD, ANDREW W. BATCHELOR, BEN BANNEY, TILAK T. CHANDRATILLEKE
Year of Publication 27.01.2005
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Year of Publication 27.01.2005
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Heat exchanger for an electronic heat pump
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Year of Publication 16.09.2003
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Year of Publication 16.09.2003
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Heat exchanger for an electronic heat pump
Batchelor, Andrew W, Banney, Ben, McDonald, David, Chandratilleke, Tilak T
Year of Publication 16.09.2003
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Year of Publication 16.09.2003
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Heat exchanger for an electronic heat pump
MCDONALD DAVID, CHANDRATILLEKE TILAK T, BATCHELOR ANDREW W, BANNEY BEN
Year of Publication 12.12.2002
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Year of Publication 12.12.2002
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Heat exchanger for an electronic heat pump
Banney, Ben, Batchelor, Andrew, McDonald, David, Chandratilleke, Tilak
Year of Publication 12.12.2002
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Year of Publication 12.12.2002
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Heat exchanger for an electronic heat pump
MCDONALD DAVID, CHANDRATILLEKE TILAK T, BATCHELOR ANDREW W, BANNEY BEN
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
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Heat exchanger for an electronic heat pump
Batchelor, Andrew W, Banney, Ben, McDonald, David, Chandratilleke, Tilak T
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
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HEAT EXCHANGER FOR AN ELECTRONIC HEAT PUMP
BANNEY, BEN, MCDONALD, DAVID, BATCHELOR, ANDREW, W, CHANDRATILLEKE, TILAK, T
Year of Publication 17.07.2002
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Year of Publication 17.07.2002
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Heat exchanger for an electronic heat pump
TILAK T CHANDRATILLEKE, DAVID MCDONALD, ANDREW W BATCHELOR, BEN BANNEY
Year of Publication 10.05.2001
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Year of Publication 10.05.2001
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HEAT EXCHANGER FOR AN ELECTRONIC HEAT PUMP
BANNEY, BEN, MCDONALD, DAVID, BATCHELOR, ANDREW, W, CHANDRATILLEKE, TILAK, T
Year of Publication 12.04.2001
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Year of Publication 12.04.2001
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