반도체 프로세싱 동안 기판들 상에 자기장들을 생성하기 위한 장치
YOSHIDOME GOICHI, KALATHIPARAMBIL KISHOR KUMAR, BANGALORE UMESH SUHAS
Year of Publication 25.04.2024
Get full text
Year of Publication 25.04.2024
Patent
간격 보상을 사용하여 타깃 수명에 걸친 기판 온도 불균일성 감소
RIKER MARTIN LEE, PETHE SHIRISH A, RAO PREETHAM, ZHANG FUHONG, KALATHIPARAMBIL KISHOR KUMAR, ZHONG LANLAN, BANGALORE UMESH SUHAS
Year of Publication 17.10.2023
Get full text
Year of Publication 17.10.2023
Patent
반도체 프로세싱 중에 자기장들을 형성하기 위한 방법들
SAMANT SUSHIL ARUN, YOSHIDOME GOICHI, RIKER MARTIN LEE, PETHE SHIRISH A, ZHANG FUHONG, KALATHIPARAMBIL KISHOR KUMAR, LEI WEI, KOTHNUR PRASHANTH, TOMKO ANDREW, BANGALORE UMESH SUHAS
Year of Publication 01.02.2024
Get full text
Year of Publication 01.02.2024
Patent
Apparatus for generating magnetic fields on substrates during semiconductor processing
Kalathiparambil, Kishor Kumar, Yoshidome, Goichi, Bangalore Umesh, Suhas
Year of Publication 02.07.2024
Get full text
Year of Publication 02.07.2024
Patent
APPARATUS FOR GENERATING MAGNETIC FIELDS ON SUBSTRATES DURING SEMICONDUCTOR PROCESSING
KALATHIPARAMBIL, Kishor Kumar, BANGALORE UMESH, Suhas, YOSHIDOME, Goichi
Year of Publication 27.04.2023
Get full text
Year of Publication 27.04.2023
Patent
APPARATUS FOR GENERATING MAGNETIC FIELDS ON SUBSTRATES DURING SEMICONDUCTOR PROCESSING
KALATHIPARAMBIL, Kishor Kumar, BANGALORE UMESH, Suhas, YOSHIDOME, Goichi
Year of Publication 01.12.2022
Get full text
Year of Publication 01.12.2022
Patent
Collimator for a physical vapor deposition chamber
Riker, Martin Lee, Bangalore Umesh, Suhas, Shimoga Mylarappa, Madan Kumar, Zhang, Fuhong
Year of Publication 13.08.2024
Get full text
Year of Publication 13.08.2024
Patent
Electromagnet pulsing effect on PVD step coverage
Ju, Zheng, Kashefi, Kevin, Wang, Xiaodong, Cen, Jiajie, Bangalore Umesh, Suhas
Year of Publication 09.04.2024
Get full text
Year of Publication 09.04.2024
Patent
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
Ju, Zheng, Wang, Xiaodong, KASHEFI, Kevin, Cen, Jiajie, Bangalore Umesh, Suhas
Year of Publication 05.10.2023
Get full text
Year of Publication 05.10.2023
Patent
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
JU, Zheng, CEN, Jiajie, BANGALORE UMESH, Suhas, KASHEFI, Kevin, WANG, Xiaodong
Year of Publication 05.10.2023
Get full text
Year of Publication 05.10.2023
Patent
Apparatus for generating magnetic field on substrate during semiconductor processing
YOSHIDOME GOICHI, UMESH SUHAS BANGALORE, KARATI PARABIL, GHISAL, KUMAR
Year of Publication 28.05.2024
Get full text
Year of Publication 28.05.2024
Patent
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
KALATHIPARAMBIL, Kishor Kumar, RIKER, Martin Lee, ZHANG, Fuhong, TOMKO, Andrew, SAMANT, Sushil Arun, BANGALORE UMESH, Suhas, LEI, Wei, KOTHNUR, Prashanth, YOSHIDOME, Goichi, PETHE, Shirish A
Year of Publication 01.12.2022
Get full text
Year of Publication 01.12.2022
Patent