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OBJECT PROCESSING APPARATUS AND GAS CONTROLER

OBJECT PROCESSING APPARATUS AND GAS CONTROLER

by CHANG WON CHAE, BANG HYUN IL, KIM HONG JIK, HAN YOUNG KI
Year of Publication 31.07.2019

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Patent

Object Treatment Apparatus and Method

Object Treatment Apparatus and Method

by CHANG WON CHAE, BANG HYUN IL, KIM HONG JIK, HAN YOUNG KI
Year of Publication 22.07.2019

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Patent

OBJECT PROCESSING APPARATUS AND GAS CONTROLER

OBJECT PROCESSING APPARATUS AND GAS CONTROLER

by CHOI JONG KI, PARK JUNG HO, BANG HYUN IL, CHO HYEON DONG
Year of Publication 31.12.2019

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Patent

FILTERING DEVICE FOR SEMICONDUCTOR DEPOSITION APPARATUS

FILTERING DEVICE FOR SEMICONDUCTOR DEPOSITION APPARATUS

by BANG, HYUN IL
Year of Publication 01.02.2000

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Patent

THERMOCOUPLE CHECKING APPARATUS OF REACTOR CHAMBER FOR SEMICONDUCTOR MANUFACTURING PROCESS

THERMOCOUPLE CHECKING APPARATUS OF REACTOR CHAMBER FOR SEMICONDUCTOR MANUFACTURING PROCESS

by BANG, HYUN-IL
Year of Publication 01.07.1999

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Patent