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Year of Publication 11.01.2022
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Year of Publication 11.01.2022
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Apparatus and methods for improving chemical utilization rate in deposition process
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Year of Publication 01.08.2023
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Year of Publication 30.05.2024
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Year of Publication 30.05.2024
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BASE PLATE FOR HEATER PEDESTAL
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Year of Publication 29.06.2023
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Year of Publication 29.06.2023
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Multi-station chamber lid with precise temperature and flow control
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Year of Publication 24.08.2021
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Year of Publication 24.08.2021
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METHOD AND SYSTEM FOR CLEANING A PROCESS CHAMBER
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Year of Publication 27.04.2023
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Year of Publication 27.04.2023
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GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
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Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
Baluja, Sanjeev, Mustafa, Muhannad, Chang, Youngki, Ramadas, Rakesh, Patel H B, Shashidhara, Kashyap, Dhritiman Subha, Agarwal, Ashutosh
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
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METROLOGY SLOT PLATES
Doering, Kenneth Brian, Baluja, Sanjeev, Sampathkumar, Shrihari, Zhang, Chunlei, Shah, Vivek B, Agarwal, Ashutosh
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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METROLOGY SLOT PLATES
DOERING, Kenneth Brian, SHAH, Vivek B, BALUJA, Sanjeev, AGARWAL, Ashutosh, ZHANG, Chunlei, SAMPATHKUMAR, Shrihari
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER
TOMKO, Andrew, HARRELSON, Wade, BALUJA, Sanjeev, SUBRAMANI, Anantha, GUO, Yang, FORSTER, John, MURTAGH, Mike, CHAN, Anthony, GANTA, Sathya
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
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