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Materials and methods for chemical-mechanical planarization
by
BALIJEPALLI SUDHAKAR
,
ALDRICH DALE J
.,
GRIER LAURA A
Year of Publication
17.05.2006
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Patent
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Patent
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chemistry
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medicine
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sciences
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Topic
dressing or conditioning of abrading surfaces
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feeding of grinding, polishing, or lapping agents
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grinding
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machines, devices, or processes for grinding or polishing
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performing operations
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polishing
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English
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esp@cenet
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