COMBINED X-RAY AND OPTICAL METROLOGY
BAKEMAN MICHAEL, SHCHEGROV ANDREI, DZIURA THADDEUS GERARD, PETERLINZ KEVIN
Year of Publication 15.11.2019
Get full text
Year of Publication 15.11.2019
Patent
COMBINED X-RAY AND OPTICAL METROLOGY
BAKEMAN MICHAEL, SHCHEGROV ANDREI, DZIURA THADDEUS GERARD, PETERLINZ KEVIN
Year of Publication 16.03.2016
Get full text
Year of Publication 16.03.2016
Patent
METHODS AND APPARATUS FOR MEASURING SEMICONDUCTOR DEVICE OVERLAY USING X-RAY METROLOGY
SHCHEGROV ANDREI V, MIEHER WALTER D, VELDMAN ANDREI, BAKEMAN MICHAEL S
Year of Publication 01.07.2016
Get full text
Year of Publication 01.07.2016
Patent
OPTICAL METROLOGY USING TARGETS WITH FIELD ENHANCEMENT ELEMENTS
BAKEMAN MICHAEL, SHCHEGROV ANDREI, KUZNETSOV ALEXANDER, MADSEN JONATHAN, TSAI BIN MING (BENJAMIN), DZIURA THADDEUS
Year of Publication 03.11.2014
Get full text
Year of Publication 03.11.2014
Patent
Megagauss Magnetic Fields for Magnetized Laser-Plasma Experiments: Special issue on Megagauss Magnetic Fields: Production and Application
PRESURA, Radu, PLECHATY, Christopher, MARTINEZ, David, BAKEMAN, Michael S, LACA, Paul J, HAEFNER, Constantin, ASTANOVITSKIY, Alexey L, THOMPSON, Matthew
Published in IEEE transactions on plasma science (2008)
Get full text
Published in IEEE transactions on plasma science (2008)
Journal Article
Megagauss Magnetic Fields for Magnetized Laser-Plasma Experiments
Presura, R., Plechaty, C., Martinez, D., Bakeman, M.S., Laca, P.J., Haefner, C., Astanovitskiy, A.L., Thompson, M.
Published in IEEE transactions on plasma science (01.02.2008)
Published in IEEE transactions on plasma science (01.02.2008)
Get full text
Journal Article