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Year of Publication 18.10.2023
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Year of Publication 27.03.2023
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Year of Publication 12.06.2023
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GOMM TROY, KALLURKAR SRINIVAS RAO HEMANTH RAO, KESHAVAMURTHY ARUN, DONNELLY SEAN M, BAILEY CURTIS W, LAKSHMANA MANJUNATHA H
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Year of Publication 07.02.2023
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Year of Publication 14.10.2022
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Year of Publication 14.10.2022
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에지 링 리프트를 사용한 동적 (dynamic) 시스 (sheath) 제어
BLANK RICHARD M, BAILEY CURTIS W, JANICKI MICHAEL. J, HIESTER JACOB LEE
Year of Publication 09.07.2021
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Year of Publication 09.07.2021
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기판 지지부들의 온도 분포 프로파일들에 영향을 주는 튜닝 가능한 열 차폐부 (heat shield) 및 튜닝 불가능한 열 차폐부
SAURABH ASHISH, GOMM TROY, THOMAS TIMOTHY SCOTT, LEESER KARL FREDERICK, SINGH MUKESH DHAMI, BAILEY CURTIS W, CHEN XINYI
Year of Publication 31.05.2022
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Year of Publication 31.05.2022
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Year of Publication 18.03.2021
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Year of Publication 18.03.2021
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DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
JANICKI, Michael., J, BLANK, Richard, M, HIESTER, Jacob, Lee, BAILEY, Curtis, W
Year of Publication 03.01.2024
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Year of Publication 03.01.2024
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DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
JANICKI, Michael., J, BLANK, Richard, M, HIESTER, Jacob, Lee, BAILEY, Curtis, W
Year of Publication 03.01.2024
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Year of Publication 03.01.2024
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DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
JANICKI, Michael., J, BLANK, Richard, M, HIESTER, Jacob, Lee, BAILEY, Curtis, W
Year of Publication 08.11.2023
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Year of Publication 08.11.2023
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DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
Bailey, Curtis W, Blank, Richard M, Janicki, Michael J, Hiester, Jacob Lee
Year of Publication 23.03.2023
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Year of Publication 23.03.2023
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PARASITIC PLASMA SUPPRESSOR
BABBAR, Yogesh, JAFARIAN-TEHRANI, Sam, CHENG, Weifeng, MARTIN, Keith Joseph, BRENINGER, Andrew H, FRENCH, David, SAKIYAMA, Yukinori, BAILEY, Curtis W
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
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FACELESS SHOWERHEAD
Draper, Emile, Jones, Christopher Matthew, Bailey, Curtis W, Williams, Brian Joseph, Ramnani, Pankaj Ghanshyam, Bapat, Shriram Vasant, Shankar, Nagraj
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
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Dynamic sheath control with edge ring lift
Bailey, Curtis W, Blank, Richard M, Janicki, Michael J, Hiester, Jacob Lee
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
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DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
JANICKI, Michael., J, BLANK, Richard, M, BAILEY, Curtis, W, HIESTER, Javob, Lee
Year of Publication 12.10.2022
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Year of Publication 12.10.2022
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