Young's modulus determination of low-k porous films by wide-band DCC/LD LSAW
Bai, Maosen (茂森 白), Fu, Xing (星傅), Dorantes, Dante, Jin, Baoyin (宝印 金), Hu, Xiaotang (小唐 胡)
Published in Journal of semiconductors (01.10.2011)
Published in Journal of semiconductors (01.10.2011)
Get full text
Journal Article