EUV EUV EXPOSURE APPARATUS
HAUF MARKUS, WALTER HOLGER, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM BUN PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, STICKEL FRANZ JOSEF, KUERZ PETER, LIMBACH GUIDO
Year of Publication 05.09.2018
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Year of Publication 05.09.2018
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OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Baer, Norman, Buettner, Paul, Gruner, Toralf, Dirauf, Andre, Monz, Thomas
Year of Publication 12.10.2023
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Year of Publication 12.10.2023
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Microscopic theory of quantum dot luminescence spectra
Gies, Christopher, Baer, Norman, Wiersig, Jan, Jahnke, Frank
Published in Physica status solidi. C (01.08.2006)
Published in Physica status solidi. C (01.08.2006)
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Journal Article
EUV EUV EXPOSURE APPARATUS
HAUF MARKUS, WALTER HOLGER, HEMBACHER STEFAN, LOERING ULRICH, LAUFER TIMO, BAER NORMAN, KWAN YIM BUN PATRICK, VAN SCHOOT JAN, NATT OLIVER, WITTICH GERO, STICKEL FRANZ JOSEF, KUERZ PETER, LIMBACH GUIDO
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
GRUNER, Toralf, VAN BERKEL, Koos, BAER, Norman, STIEPAN, Hans-Michael, STREEFKERK, Bob, SCHNEIDER, Eva, LORENZ, Maike, VAN BOKHOVEN, Laurentius Johannes Adrianus, MONZ, Thomas
Year of Publication 14.06.2023
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Year of Publication 14.06.2023
Patent
OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM
GRUNER, Toralf, VAN BERKEL, Koos, VAN BOKHOVEN, Laurentius J.A, BAER, Norman, STIEPAN, Hans-Michael, STREEFKERK, Bob, SCHNEIDER, Eva, LORENZ, Maike, DIRAUF, André, MONZ, Thomas
Year of Publication 10.02.2022
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Year of Publication 10.02.2022
Patent
Optisches System, sowie Verfahren zum Betreiben eines optischen Systems
Büttner, Paul, Baer, Norman, Gruner, Toralf, Dirauf, Andre, Monz, Thomas
Year of Publication 19.01.2023
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Year of Publication 19.01.2023
Patent
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
GRUNER, Toralf, BUETTNER, Paul, BAER, Norman, DIRAUF, Andre, MONZ, Thomas
Year of Publication 04.08.2022
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Year of Publication 04.08.2022
Patent
Optisches System, sowie Verfahren zum Betreiben eines optischen Systems
Büttner, Paul, Baer, Norman, Gruner, Toralf, Dirauf, Andre, Monz, Thomas
Year of Publication 28.07.2022
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Year of Publication 28.07.2022
Patent