Low-temperature dopant activation using nanosecond ultra-violet laser annealing for monolithic 3D integration
Kim, Jin-Hyun, Ji, Hyung-Min, Nguyen, Manh-Cuong, Nguyen, An Hoang-Thuy, Kim, Sang-Woo, Baek, Jong-Yeon, Kim, Jiyoung, Choi, Rino
Published in Thin solid films (01.10.2021)
Published in Thin solid films (01.10.2021)
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