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Year of Publication 27.07.2022
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Scrubber system and wet cleaning method using the same
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Year of Publication 27.07.2022
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Year of Publication 27.07.2022
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Apparatus for collecting by-product and method for collecting by-product
Gim, Suji, Jeon, Iljun, Roh, Youngseok, Bae, Jongyong, Maeng, Seoyoung, Pyeon, Jungjoon
Year of Publication 30.05.2023
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Year of Publication 30.05.2023
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Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
Han, Donghoon, Kim, Minjoon, Uh, Jiho, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lim, Hongtaek
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
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Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
Lee, Jihnkoo, Gim, Suji, Yook, Sunwoo, Hwang, Jongha, Roh, Youngseok, Ko, Youngduk, Bae, Jongyong, Maeng, Seoyoung, Pyeon, Jungjoon
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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SCRUBBER SYSTEM AND WET CLEANING METHOD USING THE SAME
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Year of Publication 06.06.2024
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Year of Publication 06.06.2024
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REACTION GAS SUPPLY SYSTEM
PYEON, Jungjoon, ROH, Youngseok, MAENG, Seoyoung, BAE, Jongyong, GIM, Suji, JEON, Iljun
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
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Scrubber system and wet cleaning method using the same
Roh, Young Seok, Lee, Sunsoo, Gim, Suji, Jeon, Dong Keun, Joo, Jinkyoung, Bae, Jongyong, Yoon, Sung Chul, Kim, Heesub, Park, Hee Ock
Year of Publication 19.03.2024
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Year of Publication 19.03.2024
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APPARATUS FOR COLLECTING BY-PRODUCT AND METHOD FOR COLLECTING BY-PRODUCT
Gim, Suji, Jeon, Iljun, Roh, Youngseok, Bae, Jongyong, Maeng, Seoyoung, Pyeon, Jungjoon
Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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Gas supply and layer deposition apparatus including the same
Han, Donghoon, Kim, Minjoon, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lee, Kyuho
Year of Publication 11.01.2022
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Year of Publication 11.01.2022
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EXHAUST GAS PROCESSING SYSTEM INCLUDING ADSORBENT FOR SUPPRESSING POWDER-LIKE BYPRODUCT
PYEON, Jungjoon, YOOK, Sunwoo, HWANG, Jongha, ROH, Youngseok, MAENG, Seoyoung, LEE, Jihnkoo, BAE, Jongyong, GIM, Suji, KO, Youngduk
Year of Publication 30.06.2022
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Year of Publication 30.06.2022
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VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND RELATED METHOD OF MANUFACTURE
Han, Donghoon, Kim, Minjoon, Uh, Jiho, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lim, Hongtaek
Year of Publication 11.03.2021
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Year of Publication 11.03.2021
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GAS SUPPLY AND LAYER DEPOSITION APPARATUS INCLUDING THE SAME
Han, Donghoon, Kim, Minjoon, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lee, Kyuho
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
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SCRUBBER SYSTEM AND WET CLEANING METHOD USING THE SAME
JOO, Jinkyoung, KIM, Heesub, PARK, Hee Ock, YOON, Sung Chul, ROH, Young Seok, BAE, Jongyong, GIM, Suji, LEE, Sunsoo, JEON, Dong Keun
Year of Publication 21.07.2022
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Year of Publication 21.07.2022
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