{100}-Textured, piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: integration, deposition and properties
LEDERMANN, Nicolas, MURALT, Paul, BABOROWSKI, Jacek, GENTIL, Sandrine, MUKATI, Kapil, CANTONI, Marco, SEIFERT, Andreas, SETTER, Nava
Published in Sensors and actuators. A. Physical. (01.07.2003)
Published in Sensors and actuators. A. Physical. (01.07.2003)
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Journal Article
{1 0 0}-Textured, piezoelectric Pb(Zr x, Ti 1− x)O 3 thin films for MEMS: integration, deposition and properties
Ledermann, Nicolas, Muralt, Paul, Baborowski, Jacek, Gentil, Sandrine, Mukati, Kapil, Cantoni, Marco, Seifert, Andreas, Setter, Nava
Published in Sensors and actuators. A. Physical. (15.07.2003)
Published in Sensors and actuators. A. Physical. (15.07.2003)
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Journal Article
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
Muralt, P., Ledermann, N., Paborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., Setter, N.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
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Journal Article
Piezoelectric Pb(Zrx, Ti1−x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
Ledermann, Nicolas, Muralt, Paul, Baborowski, Jacek, Forster, Martin, Pellaux, Jean-Paul
Published in Journal of micromechanics and microengineering (01.12.2004)
Published in Journal of micromechanics and microengineering (01.12.2004)
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Journal Article
Piezoelectric Pb(Zr x , Ti 1 x )O 3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
Ledermann, Nicolas, Muralt, Paul, Baborowski, Jacek, Forster, Martin, Pellaux, Jean-Paul
Published in Journal of micromechanics and microengineering (01.12.2004)
Published in Journal of micromechanics and microengineering (01.12.2004)
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Journal Article
Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices
Meyer, Y, Verdot, T, Collet, M, Baborowski, J, Muralt, P
Published in Smart materials and structures (01.02.2007)
Published in Smart materials and structures (01.02.2007)
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Journal Article
Piezoelectric cantilever microphone for photoacoustic gas detector
Ledermann, Nicolas, Baborowski, Jacek, Seifert, Andreas, Willing, Bert, Hiboux, Stephane, Muralt, Paul, Setter, Nava, Forster, Martin
Published in Integrated ferroelectrics (01.02.2001)
Published in Integrated ferroelectrics (01.02.2001)
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Journal Article
Silicon resonator of the tuning-fork type
Baborowski, Jacek, Bourgeois, Claude, Dubois, Marc-Alexandre, Ruffieux, David
Year of Publication 17.01.2012
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Year of Publication 17.01.2012
Patent
Silicon resonator of the tuning-fork type
BABOROWSKI JACEK, RUFFIEUX DAVID, DUBOIS MARC-ALEXANDRE, BOURGEOIS CLAUDE
Year of Publication 17.01.2012
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Year of Publication 17.01.2012
Patent
SILICON RESONATOR OF THE TUNING-FORK TYPE
BOURGEOIS, CLAUDE, RUFFIEUX, DAVID, DUBOIS, MARC-ALEXANDRE, BABOROWSKI, JACEK
Year of Publication 11.08.2010
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Year of Publication 11.08.2010
Patent