A multi-factorial approach for middle-of-line design rule validation and optimization in 22FDX
Ramadout, Benoit, Wehella-Gamage, Deepal, Staiger, Thomas, Babich, Katherina, Moll, Hans-Peter, Wallner, Jin, Patterson, Oliver D.
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
Pattern Matching Rule Ranking through Design of Experiments and Silicon Validation
ASM International
Published in ISTFA™ 2018 - Conference Proceedings from the 44th International Symposium for Testing and Failure Analysis, October 28-November 1, 2018, Phoenix Convention Center, Phoenix, Arizona, USA (2018)
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Published in ISTFA™ 2018 - Conference Proceedings from the 44th International Symposium for Testing and Failure Analysis, October 28-November 1, 2018, Phoenix Convention Center, Phoenix, Arizona, USA (2018)
Book Chapter
Method to improve nucleation of materials on graphene and carbon nanotubes
CALLEGARI ALESSANDRO, KIEWRA EDWARD, BABICH KATHERINA, SUN YANNING, CHEN ZHIHONG
Year of Publication 25.11.2014
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Year of Publication 25.11.2014
Patent
Method to improve nucleation of materials on graphene and carbon nanotubes
CALLEGARI ALESSANDRO, KIEWRA EDWARD, BABICH KATHERINA, SUN YANNING, CHEN ZHIHONG
Year of Publication 26.08.2014
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Year of Publication 26.08.2014
Patent
Selective nanotube growth inside vias using an ion beam
JOHN CONNOLLY, KATHERINA BABICH, ALESSANDRO CALLEGARI, EUGENE O'SULLIVAN
Year of Publication 30.10.2013
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Year of Publication 30.10.2013
Patent