ANTIREFLECTIVE SIO-CONTAINING COMPOSITIONS FOR HARDMASK LAYER
MARIE ANGELOPOULOS, WU-SONG HUANG, KATHERINA BABICH, ARPAN, P. MAHOROWALA, RATNAM SOORIYAKUMARAN, PHILLIP BROCK, DAVID, R. MEDEIROS, DIRK PFEIFFER
Year of Publication 03.11.2003
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Year of Publication 03.11.2003
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ANTIREFLECTIVE SIO-CONTAINING COMPOSITIONS FOR HARDMASK LAYER
BROCK, PHILLIP, MAHOROWALA, ARPAN, P, MEDEIROS, DAVID, R, PFEIFFER, DIRK, HUANG, WU-SONG, SOORIYAKUMARAN, RATNAM, ANGELOPOULOS, MARIE, BABICH, KATHERINA
Year of Publication 30.10.2003
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Year of Publication 30.10.2003
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Antireflective SiO-containing compositions for hardmask layer
BROCK PHILLIP, HUANG WU-SONG, MEDEIROS DAVID R, BABICH KATHERINA, MAHOROWALA ARPAN P, PFEIFFER DIRK, SOORIYAKUMARAN RATNAM, ANGELOPOULOS MARIE
Year of Publication 23.10.2003
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Year of Publication 23.10.2003
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Forming a pattern of a negative photoresist
BABICH INNA V, PETRILLO KAREN E, BABICH EDWARD D, BABICH KATHERINA E, BUCCHIGNANO JAMES J, RISHTON STEVEN A, ANGELOPOULOS MARIE
Year of Publication 26.06.2001
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Year of Publication 26.06.2001
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Layered resist system using tunable amorphous carbon film as a bottom layer and methods of fabrication thereof
BRUNNER TIMOTHY ALLAN, CALLEGARI ALESSANDRO CESARE, BABICH, KATHERINA, E, JAHNES, CHRISTOPHER, V, PATEL VISHNUBHAI VITTHALBHAI, GRILL ALFRED
Year of Publication 22.08.2000
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Year of Publication 22.08.2000
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Attenuated embedded phase shift photomask blanks
RACETTE KENNETH CHRISTOPHER, BABICH KATHERINA, LANG ROBERT N, HIBBS MICHAEL STRAIGHT, MAHOROWALA ARPAN PRAVIN, ANGELOPOULOS MARIE, CHEY S. JAY
Year of Publication 28.04.2010
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Year of Publication 28.04.2010
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Multilayer interconnect structure containing air gaps and method for making
CARRUTHERS ROY ARTHUR, HEDRICK JEFFREY CURTIS, SAENGER KATHERINE LYNN, BABICH KATHERINA E, JAHNES CHRISTOPHER VINCENT, MAYS EBONY LYNN, DALTON TIMOTHY JOSEPH, GRILL ALFRED, PERRAUD LAURENT, PURUSHOTHAMAN SAMPATH
Year of Publication 31.10.2002
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Year of Publication 31.10.2002
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Lithographic antireflective hardmask compositions and uses thereof
PFEIFFER, DIRK, MAHOROWALA, ARPAN P, BABICH, KATHERINA, MEDEIROS, DAVID R
Year of Publication 16.04.2005
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Year of Publication 16.04.2005
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Techniques for patterning features in semiconductor devices
ALLEN, SCOTT D, HOLMES, STEVEN J, WISE, RICHARD STEPHAN, BABICH, KATHERINA E, PFEIFFER, DIRK, MAHOROWALA, ARPAN P
Year of Publication 16.07.2005
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Year of Publication 16.07.2005
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Attenuated embedded phase shift photomask blanks
KENNETH CHRISTOPHER RACETTE, LANG, ROBERT N, ANGELOPOULOS, MARIE, BABICH, KATHERINA, CHEY, S. JAY, HIBBS, MICHAEL STRAIGHT, ARPAN PRAVIN MAHOROWALA
Year of Publication 01.02.2004
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Year of Publication 01.02.2004
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Antireflective SIO-containing compositions for hardmask layer
BROCK, PHILLIP, ARPAN P MAHOROWALA, RATNAM SOORIYAKUMARAN, DAVID R. MEDEIROS, PFEIFFER, DIRK, HUANG, WU-SONG, ANGELOPOULOS, MARIE, BABICH, KATHERINA
Year of Publication 01.12.2003
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Year of Publication 01.12.2003
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LAYERED RESIST SYSTEM USING TUNABLE AMORPHOUS CARBON FILM AS A BOTTOM LAYER AND METHODS OF FABRICATION THEREOF
ALESSANDRO CESARE CALLEGARI, VISHNUBHAI VITTHALBHAI PATEL, ALFRED GRILL, CHRISTOPHER V. JAHNES, KATHERINA E. BABICH, TIMOTHY ALLAN BRUNNER
Year of Publication 31.10.2007
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Year of Publication 31.10.2007
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TUNABLE AND REMOVABLE PLASMA DEPOSITED ANTIREFLECTIVE COATINGS
ALESSANDRO CESARE CALLEGARI, VISHNUBHAI VITTHALBHAI PATEL, ALFRED GRILL, CHRISTOPHER JAHNES, JULIEN FONTAINE, KATHERINA E BABICH
Year of Publication 28.10.2005
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Year of Publication 28.10.2005
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