SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD
BABBS DANIEL A, WATTS MICHAEL P. C, XU FRANK Y, LAD PANKAJ B, VOISIN RONALD D, STACEY NICHOLAS A, EZEKOYE OFODIKE A, VOTH DUANE J, TRUSKETT VAN N, MCMACKIN IAN M
Year of Publication 23.05.2012
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Year of Publication 23.05.2012
Patent
SINGLE PHASE FLUID IMPRINT LITHOGRAPHY METHOD
BABBS DANIEL A, WATTS MICHAEL P. C, XU FRANK Y, LAD PANKAJ B, VOISIN RONALD D, STACEY NICHOLAS A, EZEKOYE OFODIKE A, VOTH DUANE J, TRUSKETT VAN N, MCMACKIN IAN M
Year of Publication 04.11.2011
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Year of Publication 04.11.2011
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INTERFEROMETRIC ANALYSIS FOR THE MANUFACTURE OF NANO-SCALE DEVICES
SCHUMAKER, Philip, D, RAFFERTY, Tom H, CHOI, Byung-Jin, NIMMAKAYALA, Pawan K, BABBS, Daniel, A, TRUSKETT, Van, N, AGHILI, Alireza
Year of Publication 09.08.2017
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Year of Publication 09.08.2017
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, AND BUFFER SYSTEM
MICHAEL L BUCHANAN, CHRISTOPHER HOFMEISTER, WILLIAM FOSNIGHT, ROBERT C MAY, GILCHRIST ULYSSES, DANIEL A BABBS
Year of Publication 14.08.2014
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Year of Publication 14.08.2014
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METHOD, SYSTEM, HOLDER AND ASSEMBLY FOR TRANSFERRING TEMPLATES DURING IMPRINT LITHOGRAPHY PROCESSES
MEISSL, MARIO, J, BABBS, DANIEL, A, CHOI, BYUNG-JIN, BAILEY, HILLMAN, L
Year of Publication 10.11.2010
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Year of Publication 10.11.2010
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