Growth of Target Race Track Profile during Magnetron Sputtering
NAKANO, Takeo, SAITOU, Yudai, UEDA, Mariko, ITAMURA, Noriaki, BABA, Shigeru
Published in Journal of the Vacuum Society of Japan (2015)
Published in Journal of the Vacuum Society of Japan (2015)
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Journal Article
Application of FFT-Based Signal Analysis to Micro-Scratch Testing for Adhesion Strength Measurement of Thin Films and Measured Results Based on Different Measurement Parameters
Kyouno, Noboru, Arai, Daisuke, Takeshita, Kyo, Baba, Shigeru
Published in Journal of adhesion science and technology (01.01.2009)
Published in Journal of adhesion science and technology (01.01.2009)
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Journal Article
Transition of Roughness Evolution in Cu–In Alloy Films by the Formation of Intermetallic Compounds
Nakano, Takeo, Mizuhashi, Hiroshi, Baba, Shigeru
Published in Japanese Journal of Applied Physics (01.04.2005)
Published in Japanese Journal of Applied Physics (01.04.2005)
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