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Published in SPIE proceedings series (18.09.2000)
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Encoder, position measurement system and lithographic apparatus
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Encoder, position measurement system and lithographic apparatus
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Encoder, position measurement system and lithographic apparatus
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Year of Publication 21.02.2017
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Encoder, position measurement system and lithographic apparatus
KOOIKER, ALLARD EELCO, COSIJNS, SUZANNE JOHANNA ANTONETTA GEER, TONG-MINH, BRYAN, PRIL, WOUTER ONNO, BAARTMAN, JAN PETER
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Year of Publication 16.09.2016
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Linear translation movement with limited range
JOHANNIS WILLEM VAN VLIET, MARCUS JOHANNES HENRICUS WILLEMS VAN DIJK, JAN PETER BAARTMAN
Year of Publication 29.01.1999
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Year of Publication 29.01.1999
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Sistema de lentes ópticas, processo de fabricação de um sistema de lentes ópticas, dispositivo de varredura óptica, e, aparelho de reprodução óptica
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Year of Publication 05.03.2002
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