Annealing study of Sb + and Al + ion-implanted ZnO
Børseth, T.M., Christensen, J.S., Maknys, K., Hallén, A., Svensson, B.G., Kuznetsov, A.Yu
Published in Superlattices and microstructures (01.10.2005)
Published in Superlattices and microstructures (01.10.2005)
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Journal Article
Millisecond processing beyond chip technology: From electronics to photonics
Skorupa, W., Anwand, W., Posselt, M., Prucnal, S., Rebohle, L., Voelskow, M., Zhou, S., McMahon, R.A., Smith, M., Gebel, T., Hentsch, W., Fendler, R., Luthge, T., Satta, A., Borseth, T.M., Kuznetsov, A.Yu, Svensson, B.G.
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
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Conference Proceeding