Search Results - "Azuma, Takeki" :: K.UTB vyhledávací portál

Angular Distribution of Sputtered Particles in Shave-off Section Processing with SDTrimSP

by Kang, So -Hee, Matsumura, Kohei, Azuma, Takeki, Tomiyasu, Bunbunoshin, Owari, Masnori
Published in Journal of Surface Analysis (2019)

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Emission Trajectory Calculation of Ions from the Shave-off Cross Section for Realization of 3D Shave-off Method

by Takagi, Yuto, Kang, So-Hee, Matsumura, Kohei, Azuma, Takeki, Tomiyasu, Bunbunoshin, Owari, Masanori
Published in E-journal of surface science and nanotechnology (14.07.2018)

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Journal Article

Angular Distribution of Sputtered Particles in Shave-off Section Processing with SDTrimSP

Emission Trajectory Calculation of Ions from the Shave-off Cross Section for Realization of 3D Shave-off Method

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