Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer
Latif, Rhonira, Jaafar, Muhammad Fahmi, Aziz, Mohd Faizal, Zain, Ahmad Rifqi Md, Yunas, Jumril, Majlis, Burhanuddin Yeop
Published in International journal of refractory metals & hard materials (01.11.2020)
Published in International journal of refractory metals & hard materials (01.11.2020)
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Journal Article
Effects of material and membrane structure on maximum temperature of microheater for gas sensor applications
Noor, Mimiwaty Mohd, Sugandi, Gandi, Aziz, Mohd Faizal, Majlis, Burhanuddin Yeop
Published in 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) (01.08.2014)
Published in 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) (01.08.2014)
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Conference Proceeding