A six-wafer combustion system for a silicon micro gas turbine engine
Mehra, A., Xin Zhang, Ayon, A.A., Waitz, I.A., Schmidt, M.A., Spadaccini, C.M.
Published in Journal of microelectromechanical systems (01.12.2000)
Published in Journal of microelectromechanical systems (01.12.2000)
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Journal Article
Development of an Animal Model to Investigate Optimal Laparoscopic Trocar Site Fascial Closure
Nanda Kumar, H, Van Sickle, K.R, Parikh, A, Louden, C, Michalek, J, Ayon, A.A, Cohn, S.M
Published in The Journal of surgical research (01.02.2013)
Published in The Journal of surgical research (01.02.2013)
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Journal Article
A high-power MEMS electric induction motor
Livermore, C., Forte, A.R., Lyszczarz, T., Umans, S.D., Ayon, A.A., Lang, J.H.
Published in Journal of microelectromechanical systems (01.06.2004)
Published in Journal of microelectromechanical systems (01.06.2004)
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Journal Article
Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching
Mehra, A., Ayon, A.A., Waitz, I.A., Schmidt, M.A.
Published in Journal of microelectromechanical systems (01.06.1999)
Published in Journal of microelectromechanical systems (01.06.1999)
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Journal Article
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
Miki, N., Zhang, X., Khanna, R., Ayón, A.A., Ward, D., Spearing, S.M.
Published in Sensors and actuators. A, Physical (15.01.2003)
Published in Sensors and actuators. A, Physical (15.01.2003)
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Journal Article
Conference Proceeding
Inertial sensor technology using DRIE and wafer bonding with connecting capability
Ishihara, K., Chi-Fan Yung, Ayon, A.A., Schmidt, M.A.
Published in Journal of microelectromechanical systems (01.12.1999)
Published in Journal of microelectromechanical systems (01.12.1999)
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Journal Article
High permittivity ferroelectric actuators for radar applications
Ficklen, J., Weaver, J., Chen, C., Ayon, A.A.
Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01.04.2009)
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Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01.04.2009)
Conference Proceeding
Anisotropic silicon trenches 300–500 μm deep employing time multiplexed deep etching (TMDE)
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Journal Article
Conference Proceeding
Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films
Zhang, X., Chen, K.-S., Ghodssi, R., Ayón, A.A., Spearing, S.M.
Published in Sensors and actuators. A, Physical (15.07.2001)
Published in Sensors and actuators. A, Physical (15.07.2001)
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Journal Article
Conference Proceeding
Wireless control of microchip capillary electrophoresis with a mobile platform
Valdez, D.C., Berg, C., Bergeron, P., Mora, M.F., Garcia, C.D., Ayon, A.A.
Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01.04.2009)
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Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01.04.2009)
Conference Proceeding
Micromachined microdevices and microinstruments
MacDonald, N.C., Adams, S.G., Ayon, A.A., Böhringer, K.F., Chen, L.-Y., Das, J.H., Haronian, D., Hofmann, W., Huang, X.T., Jazairy, A., Mihailovich, R.E., Miller, S.A., Ogo, I., Prasad, R., Reed, B.W., Saif, M.T.A., Shaw, K.A., Webb, R.Y., Xu, Y.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Conference Proceeding
Development of polysilicon igniters and temperature sensors for a micro gas turbine engine
Zhang, X., Mehra, A., Ayon, A.A., Waitz, I.A.
Published in Proceedings, IEEE micro electro mechanical systems (2002)
Published in Proceedings, IEEE micro electro mechanical systems (2002)
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Conference Proceeding
A study of multi-stack silicon-direct wafer bonding for MEMS manufacturing
Miki, N., Zhang, X., Khanna, R., Ayon, A.A., Ward, D., Spearing, S.M.
Published in Proceedings, IEEE micro electro mechanical systems (2002)
Published in Proceedings, IEEE micro electro mechanical systems (2002)
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Conference Proceeding
Low temperature silicon wafer bonding for MEMS applications
Ayon, A.A., Zhang, X., Turner, K., Choi, D., Miller, B., Nagle, S., Spearing, S.M.
Published in Proceedings, IEEE micro electro mechanical systems (2002)
Published in Proceedings, IEEE micro electro mechanical systems (2002)
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Conference Proceeding
Fabrication and characterization of a micro turbine/bearing rig
Chuang-Chia Lin, Ghodssi, R., Ayon, A.A., Dye-Zone Chen, Jacobson, S., Breuer, K., Epstein, A.H., Schmidt, M.A.
Published in Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) (1999)
Published in Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) (1999)
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Conference Proceeding