Encapsulated submillimeter piezoresistive accelerometers
Woo-Tae Park, Partridge, A., Candler, R.N., Ayanoor-Vitikkate, V., Yama, G., Lutz, M., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.06.2006)
Published in Journal of microelectromechanical systems (01.06.2006)
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Journal Article
Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beams
Ayanoor-vitikkate, V., Kuan-lin Chen, Woo-Tae Park, Yama, G., Kenny, T.W.
Published in 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium (01.11.2006)
Published in 2006 Thirty-First IEEE/CPMT International Electronics Manufacturing Technology Symposium (01.11.2006)
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Conference Proceeding
Sub-mm encapsulated accelerometers: a fully implantable sensor for cochlear implants
Woo-Tae Park, O'Connor, K.N., Mallon, J.R., Maetani, T., Candler, R.N., Ayanoor-Vitikkate V, Roberson, J.B., Puria, S., Kenny, T.W.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding