Evaluation method for evaluating the surface quality of concave axicons with high reflectivity
Wei, Zhangfan, Yuan, Qiao, Zeng, Aijun, Huang, Huijie, Avakaw, Sergey
Published in Laser physics (01.11.2020)
Published in Laser physics (01.11.2020)
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Journal Article
Polarization simulation and analysis of residual birefringence in optical materials for a hyper-NA lithography illumination system
Zhou, Ruyi, Zhu, Linglin, Zhang, Chong, Liu, Tiecheng, Zeng, Aijun, Avakaw, Sergey, Huang, Huijie
Published in Applied optics. Optical technology and biomedical optics (10.07.2019)
Published in Applied optics. Optical technology and biomedical optics (10.07.2019)
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